Energy loss in MEMS resonators and the impact on inertial and RF devices

Weinberg, Marc S.; Candler, Rob N.; Chandorkar, Saurabh A.; Varsanik, Jonathan S.; Kenny, Thomas W.; Duwel, Amy

doi:10.1109/sensor.2009.5285418

Cited by 73 publications

(36 citation statements)

References 50 publications

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“…The damping terms b 11 and b 22 in Equations (1a) and (1b) are a measure of the amount of vibration energy lost by each of the two modes typically to the surrounding environment 16,17 . If the sources of damping are not aligned with the antinodes of the modes of interest, each mode will also experience a coupling force proportional to the vibration velocity of its degenerate pair 18 .…”

Section: Mechanical Reduction Of Anisodampingmentioning

confidence: 99%

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Serrano¹,

Zaman²,

Rahafrooz³

et al. 2016

Microsyst Nanoeng

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This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature, vibration, and shock. A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave (BAW) vibratory gyro from its substrate, minimizing the effect that external sources of error have on the offset and scale factor of the device. Substrate-decoupled (SD) BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60 000 were implemented using the high aspect ratio poly and single-crystal silicon (HARPSS) process to achieve ultra-narrow capacitive gaps. Wafer-level packaged sensors were interfaced with a customized application-specific integrated circuit (ASIC) to achieve low variations in the offset across temperature (±26°s − 1 from − 40 to 85°C), supreme random-vibration immunity (0.012°s − 1 g RMS − 1 ) and excellent shock rejection. With a scale factor of 800 μV (°s, the SD-BAW gyro system attains a large full-scale range (±1250°s) with a non-linearity of less than 0.07%. A measured angle-random walk (ARW) of 0.39°/√h and a bias instability of 10.5°h − 1 are dominated by the thermal and flicker noise of the integrated circuit (IC), respectively. Additional measurements using external electronics show bias-instability values as low as 3.5°h INTRODUCTIONMicromachined gyroscopes have enabled a myriad of applications that range from basic motion detection for gaming to safety control systems in automobiles 1 . More recently, an increased interest in the use of microelectromechanical system inertial sensors for dead reckoning and pedestrian navigation in handheld electronics has placed stringent requirements on the die size, power consumption, and overall performance of this type of device. To date, most commercially available rate sensors have been designed as low-frequency flexural tuning-fork gyroscopes (TFGs), which are typically sensitive to random vibrations and prone to linear accelerations, such as those experienced under shock. These limitations complicate the use of TFG technology in large-volume, high-end applications, particularly in personal navigation, for which dependencies on fluctuations in the environment translate into long-term drift in the output of the system. Additionally, in recent months, concerns about the high sensitivity of consumer-grade gyroscopes in response to lowfrequency pressure signals that can be used to recover audio have increased as a potential threat for eavesdropping 2 , justifying the need for more environmentally robust rotation sensors.Acceleration suppression mechanisms can be implemented in TFGs to alleviate part of this problem using redundant proof masses that reject shock and vibration as common-mode signals 3 .

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Section: Mechanical Reduction Of Anisodampingmentioning

confidence: 99%

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Serrano¹,

Zaman²,

Rahafrooz³

et al. 2016

Microsyst Nanoeng

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“…Figure 19 shows a simple schematic of a vibratory gyroscope. In order to achieve high sensitivity, the frequency mismatch between drive and sense modes must remain very small, and the modes must achieve a large Q [47]. However, small symmetry-breaking variances are inevitable in MEMS structures, primarily due to fabrication tolerances, which lead to frequency mismatch and parasitic modal coupling.…”

Section: Angular Rate Sensorsmentioning

confidence: 99%

A review of parametric resonance in microelectromechanical systems

Moran

Burgner

Shaw

et al. 2013

NOLTA

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Many applications of microelectromechanical systems utilize mechanical vibratory motion. A number of interesting dynamical effects occur in these minimally damped, precisely manufactured devices. These effects can be caused by the structural mechanics, the actuation mechanism, or both. One such phenomenon, parametric resonance, occurs when displacementdependent forcing is present in the microsystem. This paper reviews the key dynamic effects, and summarizes some of the development of devices that utilize parametric resonance or parametric amplification. In addition, signal-to-noise issues are discussed with respect to the ultimate sensitivity of mass sensors that use parametric resonance, and strategies for obtaining the highest sensitivity are presented. Here the authors describe parametric resonance phenomenon as a dynamical system, review its experimental observation in microsystems, and conclude by discussing the various applications.

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“…High performances from a damping perspective can be achieved by identifying the dominant damping mechanism and considering different ways to reduce damping. There are several different energy dissipation mechanisms present in MEMS resonators: fluid damping [2,3], support loss [4,5,6], thermoelastic damping [7,8,9] and surface loss [2,10]. Fluid losses are negligible if the device is vacuum encapsulated, and surface losses are more significant in Nano-Electromechanical Systems (NEMS) devices due to increasing surface to volume ratio [11].…”

Section: Introductionmentioning

confidence: 99%

An investigation on thermoelastic damping of high-Q ring resonators

Hossain

McWilliam

Popov

2016

International Journal of Mechanical Sciences

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For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of design changes to the ring and support legs on thermoelastic damping, which is the dominant dissipation mechanism. A computational method is used to quantify the thermoelastic damping and a detailed parameter study is conducted to understand the influence of ring geometry, support legs and micro-machined slots around the ring circumference. The results show that damping in the support legs can have significant influence on the total energy dissipated from the resonator, and the optimum leg geometry can be identified to achieve high Q. It is also observed that the addition of slots improves Q for resonators having higher energy loss. However, for high-Q, rings slots have a detrimental effect. The results presented are useful for designing ring resonators with reduced levels of damping.

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Energy loss in MEMS resonators and the impact on inertial and RF devices

Cited by 73 publications

References 50 publications

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

A review of parametric resonance in microelectromechanical systems

An investigation on thermoelastic damping of high-Q ring resonators

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