Energy spectrum of fast atoms in a dark cathode space

Kuchinskii, V. V.; Sheikin, E. G.

doi:10.1007/bf00895947

Cited by 2 publications

(4 citation statements)

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“…There exists a number of works in which the analytic calculations of the fast-neutral distribution function (FNDF) in the CF is addressed [14,18,19]. The existing models generally neglect collisions/scattering, as well as production of large-angle scattered recoil neutrals and reflection from the cathode, and assume the SLT approximation.…”

Section: Fast Buffer-gas Neutralsmentioning

confidence: 99%

“…P 0 and P 1 ). Strictly speaking, it is impossible to reproduce the boundary condition (19) in terms of only the two first harmonics of the FNDF. This problem is known as Milne's problem (e.g.…”

Section: Boundary Conditions For the Fast Neutrals At The Cathode And...mentioning

confidence: 99%

“…[20]). Then, the generalized Marshak's boundary condition, as follows from (19), applied to the diffusion group (FNDF Fn ) can be written as…”

Section: Boundary Conditions For the Fast Neutrals At The Cathode And...mentioning

confidence: 99%

“…In the estimations of the sputtering rate, the sputtering coefficient by fast neutrals ζ n (w) was assumed to be the same as that by fast ions ζ i (w), and ζ i (w) in its turn was calculated according to [39]. As discussed in section 2.5, for simplicity, we use the specular-reflection boundary condition (19) with β ref = 0.5. Finally it should be mentioned that for a given set of plasma parameters (such as U , d, φ(x), T g (x), etc), the calculation of the full FNDF F n (x, v, µ) took several (up to six) CPU hours on a medium-performance workstation, whereas the calculations of the simplified FNDF took only 1-3 CPU min, which represents a significant (more than two orders of magnitude) gain in computation time.…”

Section: The Fndf: Comparison Between Full and Simplified Calculationsmentioning

confidence: 99%

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Model of the cathode region and gas temperature of a dc glow discharge at high current density

Arslanbekov¹

2000

J. Phys. D: Appl. Phys.

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A model is reported of the cathode region of a dc glow discharge at high current density. The distributions of most important plasma species (such as fast electrons, fast neutrals and ions, and energetic sputtered metal atoms) are determined either analytically or using simple semi-analytic methods, taking into account possible strong gas-density/temperature gradients. A heat-transfer equation is used to calculate the gas temperature, and the power-deposition profiles due to fast neutrals and energetic metal atoms are determined at the kinetic level. For the conditions of interest, the power-deposition profiles are shown to be strongly non-local and the assumption of Joule (local) heating to be generally inappropriate. Fast neutrals reflected from the cathode, as well as fast recoil neutrals, are shown to play a key role in determining the rate and spatial distribution of gas heating. Spectroscopic measurements of the gas temperature in a hollow-cathode discharge are carried out over a wide range of discharge conditions. The experimental and predicted gas temperatures are compared and acceptable agreement is found. A strong sensitivity of the model predictions to the assumed particle-surface interaction data is observed. The model can be readily adapted to other types of glow discharge and other geometries. It is computationally efficient and can be useful for fast self-consistent modelling of glow-discharge plasmas.

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Section: Fast Buffer-gas Neutralsmentioning

confidence: 99%

Section: Boundary Conditions For the Fast Neutrals At The Cathode And...mentioning

confidence: 99%

“…[20]). Then, the generalized Marshak's boundary condition, as follows from (19), applied to the diffusion group (FNDF Fn ) can be written as…”

Section: Boundary Conditions For the Fast Neutrals At The Cathode And...mentioning

confidence: 99%

Section: The Fndf: Comparison Between Full and Simplified Calculationsmentioning

confidence: 99%

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Model of the cathode region and gas temperature of a dc glow discharge at high current density

Arslanbekov¹

2000

J. Phys. D: Appl. Phys.

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The theory of cathodic bombardment in a glow discharge by fast neutrals

Mason¹,

Allott²

1994

J. Phys. D: Appl. Phys.

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A mathematical model is developed to calculate the flux and average energy of fast neutrals in a glow discharge based on the charge transfer model used to describe the energy distribution of ions. According to this model the average energy and relative distribution functions of both fast atoms and ions are found to be independent of pressure. Using experimental values found in the literature it is found that the fast atom flux is at least twice as large as the ion flux, but with an average energy similar to the ions. The sputter erosion of the cathode is therefore probably caused mainly by fast atom bombardment.

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Energy spectrum of fast atoms in a dark cathode space

Cited by 2 publications

References 1 publication

Model of the cathode region and gas temperature of a dc glow discharge at high current density

Model of the cathode region and gas temperature of a dc glow discharge at high current density

The theory of cathodic bombardment in a glow discharge by fast neutrals

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