Single-photon emitters (SPEs) play an important role
in many optical
quantum technologies. However, an efficient large-scale approach to
the generation of high-quality SPE arrays remains an elusive goal
at room temperature. Here, we demonstrate a scalable method of generating
SPE arrays in hexagonal boron nitride (hBN) with high yield, brightness,
and purity using single-pulse irradiation by a femtosecond laser.
Our use of a single pulse per defect pattern minimized heat-related
damages and improved the purity of SPEs compared with the previous
laser-based approaches. Under the optimized fabrication and post-treatment
conditions, SPE arrays were successfully generated from the 3.0 μm
defect patterns with 43% yield, the highest among the 2D-based top-down
approaches. Importantly, we found that 100% of the bright defect patterns
are SPEs with g
2(0) < 0.5 under such
conditions, with the lowest g
2(0) = 0.06
± 0.03. Our SPEs also exhibit the highest brightness with the
saturation SPE rate at 7.15 million counts per second. We believe
that our overall high-quality and large-scale approach will help a
wide range of applications of SPEs in on-chip quantum technologies.