1998
DOI: 10.1016/s0168-1176(97)00305-4
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Engineering surface reactions with polyatomic ions

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Cited by 15 publications
(9 citation statements)
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“…Unlike photon and electron irradiation which can promote reactivity with chemical selectivity through their direct coupling to the electronic structures of the reactants, the reaction driving forces of atom/molecule projectiles are more complex and typically influenced by charge exchange and translation−potential (T−V) energy conversion among all parties in the collision events induced by the entry of the projectile into the reaction system. Typically, projectile chemistry and energy are the key reaction attributes for improving chemical selectivity and reactivity in the design of collision-induced chemistry. The recent successes in controlled soft-landing 4,5 of hyperthermal polyatomic molecules or molecular ions fully exploit the projectile chemistry in the yield of reaction products with specific chemical functionalities.…”
Section: Introductionmentioning
confidence: 99%
“…Unlike photon and electron irradiation which can promote reactivity with chemical selectivity through their direct coupling to the electronic structures of the reactants, the reaction driving forces of atom/molecule projectiles are more complex and typically influenced by charge exchange and translation−potential (T−V) energy conversion among all parties in the collision events induced by the entry of the projectile into the reaction system. Typically, projectile chemistry and energy are the key reaction attributes for improving chemical selectivity and reactivity in the design of collision-induced chemistry. The recent successes in controlled soft-landing 4,5 of hyperthermal polyatomic molecules or molecular ions fully exploit the projectile chemistry in the yield of reaction products with specific chemical functionalities.…”
Section: Introductionmentioning
confidence: 99%
“…Ion beam processing for surface modification has drawn substantial interest due to its experimental flexibility and controllability. , For example, the decomposition of self-assembled monolayers by atomic ions has been used for lithographic patterning . The soft landing of intact individual polyatomic ions on self-assembled monolayers has also been demonstrated. The chemical modification or growth of thin films on polymer surfaces has also been achieved by hyperthermal polyatomic ions. We have previously examined the chemistry, morphology, and stability of fluorocarbon films formed on polystyrene by hyperthermal polyatomic ion deposition. We found that the fluorocarbon film chemistry depends on projectile ion energy, structure, and fluence. We observed mostly intact projectile ions deposited onto the surface at low kinetic energy (25 eV) while mostly projectile fragments deposited at higher energy (100 eV).…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8] The chemical modification or growth of thin films on polymer surfaces has also been achieved by hyperthermal polyatomic ions. [9][10][11] We have previously examined the chemistry, morphology, and stability of fluorocarbon films formed on polystyrene by hyperthermal polyatomic ion deposition. [12][13][14][15] We found that the fluorocarbon film chemistry depends on projectile ion energy, structure, and fluence.…”
Section: Introductionmentioning
confidence: 99%
“…The low-energy hydrogen bombardment was performed with a home-built and low-cost mass-separated low energy ion beam system, 16,18,40,41 which delivers a hydrogen beam to the target substrate in a high vacuum chamber. Hydrogen gas with the purity of 99.8% was used in the bombardments.…”
Section: Experimental Design and Methodsmentioning
confidence: 99%