Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

Alfonso, Marco; Lapeyronie, C.; Goubet, Manon; Viala, B.; Tortai, J.H.

doi:10.1016/j.compscitech.2021.109063

Cited by 6 publications

(2 citation statements)

References 55 publications

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“…The functionalisation step was performed by adding Polystyrene Pyrene-terminated (PyrPS) under bath sonication, in order to adsorb a thin insulating nanometric layer onto the Cu@C nanoparticles. This step was also used to improve the dispersibility of the nanoparticles in the SU8™ photoresist host as demonstrated by previous studies [20,21].…”

Section: Nanocomposites Preparationmentioning

confidence: 99%

Superior dielectric properties of epoxy-based photoresist thin film nanocomposites with carbon-coated Cu@C nanoparticles

Lapeyronie¹,

Alfonso²,

Viala³

et al. 2022

Mater. Res. Express

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The microelectronics community has shown great interest for high-k percolative nanodielectric materials for their applications as integrated capacitors. This work highlights the manufacturing process of high-quality Metal Polymer Nanocomposites (MPCs) thin dielectric films with Cu@C nanoparticles into SU8™ negative photolithographic resist. Four capacitor formulations from 0.8%vol up to 3.0%vol of Cu@C functionalized with an insulating layer of Polystyrene Pyrene-terminated (PyrPS) were produced. These films, with a targeted thickness of 15 µm, were spin-coated onto p-doped silicon wafers. Raman spectroscopy demonstrated the nature of the carbon shell of the nanoparticles and its effectiveness in protecting the core from oxidation, while SEM-EDS highlighted the uniformity of the nanoparticle distribution in the resist. Broadband dielectric spectroscopy measured an enhancement of ε_r to 124 with reasonable losses of 0.65 at 5 kHz for the (Cu@C)-PyrPS//SU8 3.0%vol nanocomposite. Through the use of Percolation Theory (PT) it was estimated the percolation threshold φ_C in the vicinity of 3.2%vol. Furthermore, no electrical aging or dielectric breakdown was detected at low voltage. All the results show the potential use of Cu@C nanoparticles to achieve a high-quality high-k MPC photoresists for the implementation as integrated capacitors.

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Section: Nanocomposites Preparationmentioning

confidence: 99%

Superior dielectric properties of epoxy-based photoresist thin film nanocomposites with carbon-coated Cu@C nanoparticles

Lapeyronie¹,

Alfonso²,

Viala³

et al. 2022

Mater. Res. Express

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mentioning

confidence: 99%

Lightweight and Highly Heat‐Resistant Microcellular Polyetherimide/Barium Titanate/Carbon Nanotube Nanocomposites with High Dielectric Permittivity and Low Dielectric Loss

Xiang

Jing

et al. 2021

Adv Eng Mater

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Dielectric materials can be used to control/ store charge and electric energy, which has important potential application value for the dielectric energy storage and intelligent sensing in areas such as aerospace, electronics, and military engineering. [1,2] The dielectric materials with high dielectric permittivity (ε 0 ) and low dielectric loss (tanδ) are of great significance to national security defense and economic development. [3][4][5][6] Ceramic-based dielectric materials are widely used in electronic components in communication, military, and other related fields due to their extremely high dielectric permittivity. [7][8][9] However, the complex preparation process, high processing temperature, brittleness, and low breakdown strength of ceramics greatly limit their application range. [10] Polymers are the industrial choice of dielectric materials for charge storage applications mainly because of their high breakdown strength and excellent processability. Nevertheless, it is a great challenge that the pure polymers always have a very low dielectric permittivity. [11][12][13] Therefore, the high dielectric composite materials obtained by integrating high dielectric particles and polymers in a certain physical/chemical way have great application prospects. One common approach is to add ceramic fillers such as barium titanate (BaTiO 3 ), barium strontium titanate (Ba x Sr 1-x TiO 3 ), and calcium copper titanate (CaCu 3 Ti 4 O 12 ) to the polymers to improve their dielectric properties. [14][15][16][17] However, a higher dielectric permittivity usually requires a higher loading of ceramic filler, which affects the machinability and mechanical strength of the composites. Another approach is to add conductive fillers such as Cu, Ag, graphene, and carbon nanotubes (CNTs) to the polymers, which can obtain very high dielectric permittivity at a low conductive filler loading. [18][19][20][21][22][23] Unfortunately, the conductive fillers are prone to agglomerate, resulting in excessive leakage current, which will cause the sharp increase in dielectric loss of the conductive filler/polymer composites. In recent years, researchers have been keen to combine

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Metal Oxide Nanofiller-Introduced Polymer-Based Nanocomposite Dielectrics for Advanced Energy Storage Devices

Panda,

Chakroborty,

Modi

et al. 2023

Nanostructure Science and Technology

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Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

Cited by 6 publications

References 55 publications

Superior dielectric properties of epoxy-based photoresist thin film nanocomposites with carbon-coated Cu@C nanoparticles

Superior dielectric properties of epoxy-based photoresist thin film nanocomposites with carbon-coated Cu@C nanoparticles

Lightweight and Highly Heat‐Resistant Microcellular Polyetherimide/Barium Titanate/Carbon Nanotube Nanocomposites with High Dielectric Permittivity and Low Dielectric Loss

Metal Oxide Nanofiller-Introduced Polymer-Based Nanocomposite Dielectrics for Advanced Energy Storage Devices

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