An
anisotropic piezoelectric response is demonstrated from InGaN
nanowires (NWs) over a pyramid-textured Si(100) substrate with an
interfacet composition and topography modulation induced by stationary
molecular beam epitaxy growth conditions, taking advantage of the
unidirectional source beam flux. The variations of InGaN NWs between
the pyramid facets are verified in terms of morphology, element distribution,
and crystalline properties. The piezoelectric response is investigated
by electrical atomic force microscopy (AFM) with a statistic analyzing
method. Representative pyramids from the ensemble, on top of which
InGaN NWs grown with a substrate held at an oblique angle, were characterized
for understanding and confirming the degree of anisotropy. The positive
deviated oscillation of the peak force error is identified as a measure
of the effective AFM tip/NW interaction with respect to the electrical
contact and mechanical deformation. The Schottky contact between the
metal-coated AFM tip and the NWs on the different facets reveals distinctions
consistent with the interfacet composition variation. The interfacet
variation of the piezoelectric response of the InGaN NWs is first
evaluated by electrical AFM under zero bias. The average current monotonically
depends on the scan frequency, which determines the average peak force
error, that is, mechanical deformation, with a facet characteristic
slope. A piezoelectric nanogenerator device is fabricated out of a
sample with an ensemble of pyramids, which exhibits anisotropic output
under periodic directional pressing. This work provides a universal
strategy for the synthesis of composite semiconductor materials with
an anisotropic piezoelectric response.