Enhanced features of Li₂CO₃ sputtered thin films induced by thickness and annealing time

Abstract

Li 2 CO 3 sputtered films of 300 nm have been subjected to physical and electrochemical characterization methods to analyze the influence of annealing treatments at 600°C for 2 h, 6 h, 12 h and 18 h on the microstructure, surface and conductivity. X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR), atomic force microscopy (AFM) and electrochemical impedance spectroscopy (EIS) have been used for this purpose. XRD and FT-IR have illustrated the evolution of the microstructure with annealing time.AFM analysis has shown the growth of new Li 2 CO 3 particles that increases with annealing time presenting a maximum diameter of 16.8 μm without compromising the continuity of the films. EIS measurements have described a fall in the activation energy of the Li 2 CO 3 thin films presenting a minimum around 1.18 eV. The results concerning the activation energy of the films have shown an improvement compared to the results obtained previously for Li 2 CO 3 . These results serve to understand and optimize the behaviour of the Li 2 CO 3 thin films in gas sensors, fuel cells or Li + ion batteries.

Electrical and electrochemical properties of imidazolium and phosphonium-based pNIPAAM ionogels

“…described. [22,23] In brief, a 200 nm gold layer was deposited by RF magnetron sputtering (Edwards coating system E306A) in an argon (Ar) atmosphere onto positive photoresist previously patterned employing a photolithographic process. An 8 nm layer of titanium (Ti) as adhesion layer was deposited by DC magnetron sputtering.…”

AZO Embedded Interdigitated Electrodes for Monitoring Stimuli Responsive Materials

“…Transparent conducting electrodes with excellent electrical and optical properties were fabricated by a merger of photolithographic structuring and ALD thin film growth. The fabrication process has been adapted from protocols described in literature and is schematically outlined in Figure a. In a typical process, the substrate was spin‐coated (Figure a‐(2)) with a positive photoresist, subsequently exposed to UV light through a photomask to transfer the interdigitated pattern (Figure a‐(3)) and the exposed photoresist was then removed by dissolution (Figure a‐(4)).…”

Thin‐film Potentiometric Sensor to Detect CO2 Concentrations Ranging Between 2 % and 100 %

“…All the metallic layers were annealed at 600 °C during two hours (step 5). Finally, the deposition of the auxiliary phase (AP) of 300 nm of Li 2 CO 3 (step 6) was performed as described in previous works . The auxiliary phase (AP) was patterned by photolithographic techniques in an interdigitated shape to maximize the contact area among AP, the electrolyte and the SE.…”