Enhanced light extraction of scintillator using large-area photonic crystal structures fabricated by soft-X-ray interference lithography

Zhu, Zhichao; Wu, Shuang; Xue, Chunlai; Zhao, Jun; Wang, Liansheng; Wu, Yanqing; Liu, Bo; Cheng, Chuanwei; Gu, Ming; Chen, Hong; Tai, Renzhong

doi:10.1063/1.4922699

Cited by 49 publications

(19 citation statements)

References 19 publications

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“…TiO 2 layer is then deposited using Atomic Layer Deposition (ALD). The high refractive index of the conformal TiO 2 layer enables light extraction enhancement of up to 95.1% [161]. This technique is mass scalable however the patterns are limited to those which can be produced from wave interference.…”

Section: Nanostructuring Of Bulk Scintillatorsmentioning

confidence: 99%

Inorganic, Organic, and Perovskite Halides with Nanotechnology for High–Light Yield X- and γ-ray Scintillators

et al. 2019

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Trends in scintillators that are used in many applications, such as medical imaging, security, oil-logging, high energy physics and non-destructive inspections are reviewed. First, we address traditional inorganic and organic scintillators with respect of limitation in the scintillation light yields and lifetimes. The combination of high–light yield and fast response can be found in Ce 3 + , Pr 3 + and Nd 3 + lanthanide-doped scintillators while the maximum light yield conversion of 100,000 photons/MeV can be found in Eu 3 + doped SrI 2 . However, the fabrication of those lanthanide-doped scintillators is inefficient and expensive as it requires high-temperature furnaces. A self-grown single crystal using solution processes is already introduced in perovskite photovoltaic technology and it can be the key for low-cost scintillators. A novel class of materials in scintillation includes lead halide perovskites. These materials were explored decades ago due to the large X-ray absorption cross section. However, lately lead halide perovskites have become a focus of interest due to recently reported very high photoluminescence quantum yield and light yield conversion at low temperatures. In principle, 150,000–300,000 photons/MeV light yields can be proportional to the small energy bandgap of these materials, which is below 2 eV. Finally, we discuss the extraction efficiency improvements through the fabrication of the nanostructure in scintillators, which can be implemented in perovskite materials. The recent technology involving quantum dots and nanocrystals may also improve light conversion in perovskite scintillators.

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Section: Nanostructuring Of Bulk Scintillatorsmentioning

confidence: 99%

Inorganic, Organic, and Perovskite Halides with Nanotechnology for High–Light Yield X- and γ-ray Scintillators

et al. 2019

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“…Another technique tested in 2014 [75] uses interference lithography of a soft X-ray coherent beam. The crystals used for this test were two BGO (BiGeO, RI = 2.15), in a slab geometry of 1 × 10 × 20 mm 3 and unwrapped configuration.…”

Section: Interference Lithography Applied To Bgomentioning

confidence: 99%

Enhancing Light Extraction of Inorganic Scintillators Using Photonic Crystals

et al. 2018

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Abstract:Inorganic scintillators are commonly used as sensors for ionizing radiation detectors in a variety of applications, ranging from particle and nuclear physics detectors, medical imaging, nuclear installations radiation control, homeland security, well oil logging and a number of industrial non-destructive investigations. For all these applications, the scintillation light produced by the energy deposited in the scintillator allows the determination of the position, the energy and the time of the event. However, the performance of these detectors is often limited by the amount of light collected on the photodetector. A major limitation comes from the fact that inorganic scintillators are generally characterized by a high refractive index, as a consequence of the required high density to provide the necessary stopping power for ionizing radiation. The index mismatch between the crystal and the surrounding medium (air or optical grease) strongly limits the light extraction efficiency because of total internal reflection (TIR), increasing the travel path and the absorption probability through multiple bouncings of the photons in the crystal. Photonic crystals can overcome this problem and produce a controllable index matching between the crystal and the output medium through an interface made of a thin nano-structured layer of optically-transparent high index material. This review presents a summary of the works aiming at improving the light collection efficiency of scintillators using photonic crystals since this idea was introduced 10 years ago.

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“…Enhanced light extraction of scintillator [29]: Scintillators are usually used in the radiation detection system. Luminescence in ultraviolet or visible emission can be excited on scintillators by radiation from X-ray, c-ray, electrons, protons and neutrons.…”

Section: Nano-sciencementioning

confidence: 99%

“…This work was supported by National Key R&D Program of China (2016YFA0401302),the [15,16], SXIL [23] and stitching multi-grating EUV-IL/SXIL [17,18] and parts of the nanoscience applications of EUV-IL are taken from [27][28][29][30][31].…”

Section: Acknowledgementsmentioning

confidence: 99%

EUV/Soft X-Ray Interference Lithography

Shen¹,

Wu²

2018

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology

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Based on the coherent radiation from an undulator source, extreme UV interference lithography (EUV-IL) technology is considered as the leading candidate for future nodes of high-volume semiconductor manufacturing. The throughput of this technique is much higher than that of traditional lithography methods such as e-beam lithography (EBL) and laser interference lithography (LIL). Different types of interference schemes based on reflection mirrors and transmission diffraction masks have been described in this chapter. Achromatic Talbot lithography (ATL) and the soft X-ray interference lithography (SXIL) with different photon energies have also been developed to produce highly dense, highresolution periodic nanostructures. Two scan-exposure techniques, one is the method employing the broadband Talbot effect and the other based on the multi-grating EUV-IL with an order sorting aperture (OSA), have been used to obtain periodic nanostructures over large areas. Applications of EUV-IL on EUV-resist testing and nano-science have been illustrated.

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Enhanced light extraction of scintillator using large-area photonic crystal structures fabricated by soft-X-ray interference lithography

Cited by 49 publications

References 19 publications

Inorganic, Organic, and Perovskite Halides with Nanotechnology for High–Light Yield X- and γ-ray Scintillators

Inorganic, Organic, and Perovskite Halides with Nanotechnology for High–Light Yield X- and γ-ray Scintillators

Enhancing Light Extraction of Inorganic Scintillators Using Photonic Crystals

EUV/Soft X-Ray Interference Lithography

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