Enhanced lithium niobate pyroelectric ionizer for chip-scale ion mobility-based gas sensing

Vinayakumar, K. B.; Gund, Ved; Lambert, Noémie; Lodha, Saurabh; Lal, Amit

doi:10.1109/icsens.2016.7808451

Cited by 12 publications

(3 citation statements)

References 9 publications

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“…Various types of gas sensors, including chemoreceptive-, ionization-, acoustic-, and resonant-based sensors are gaining more attention in different sectors, such as environmental monitoring, food safety, medical diagnosis, and industrial applications [1][2][3]. Among these, chemoreceptive-based metal oxide semiconductors (MO x ) have received tremendous interest in gas sensing due to their high surface/volume ratio, as the gas reaction process is a surface phenomenon.…”

Section: Introductionmentioning

confidence: 99%

Impact of Ag on the Limit of Detection towards NH3-Sensing in Spray-Coated WO3 Thin-Films

Anusha

Ani

Poornesh

et al. 2022

Sensors

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Ag-doped WO3 (Ag–WO3) films were deposited on a soda-lime glass substrate via a facile spray pyrolysis technique. The surface roughness of the films varied between 0.6 nm and 4.3 nm, as verified by the Atomic Force Microscopy (AFM) studies. Ammonia (NH3)-sensing measurements of the films were performed for various concentrations at an optimum sensor working temperature of 200 °C. Enrichment of oxygen vacancies confirmed by X-ray Photoelectron Spectroscopy (XPS) in 1% Ag–WO3 enhanced the sensor response from 1.06 to 3.29, approximately 3 times higher than that of undoped WO3. Limit of detection (LOD) up to 500 ppb is achieved for 1% Ag–WO3, substantiating the role of Ag in improving sensor performance.

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Section: Introductionmentioning

confidence: 99%

Impact of Ag on the Limit of Detection towards NH3-Sensing in Spray-Coated WO3 Thin-Films

Anusha

Ani

Poornesh

et al. 2022

Sensors

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“…After bonding the FEP ferroelectret and the PDMS film, the sample was charged using a pyroelectric method described in previous publications [23]. The charging process takes advantage of the pyroelectric properties of lithium niobate (LiNbO 3 ) to generate high voltage when subjected to a temperature gradient [25,26]. Thus, a custom-made charging setup, consisting of a thermoelectric cooler and a temperature controller, cycles the temperature of a LiNbO 3 crystal (25 mm diameter, 5 mm thickness) from 10 • C to 80 • C. The ferroelectret sensor, placed on top of the crystal, is subjected to the high electric field that breaks down the air molecules contained in the polymer voids and polarizes the internal surfaces.…”

Section: Charging and Characterization Of The Ferroelectret Sensormentioning

confidence: 99%

Pyroelectrically Charged Flexible Ferroelectret-Based Tactile Sensor for Surface Texture Detection

et al. 2022

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Texture detection is one of the essential features requested for artificial tactile sensing to push the demand for flexible low-cost tactile sensors in the robotics sector. In this manuscript, we demonstrate the ability of a ferroelectret-based pressure sensor together with a patterned elastomer layer to detect surface textures. The ferroelectret sensor was fabricated using fluorinated ethylene propylene (FEP) sheets bonded with a patterned adhesive layer to create cavities, integrated with the elastomer bumped surface, and finally charged using a pyroelectric method developed by our group. The ferroelectret-based sensor showed a linear response to the applied force in the range of 0.5 to 2 N, a piezoelectric coefficient of 150.1 ± 3.2 pC/N in the range of 10–80 Hz, and a flat dynamic response in the range of 10–1000 Hz. The tactile sensing characterization of the sensor, performed at different scanning speeds (10 to 30 mm/s) and gratings with different periodicities (0 to 0.8 mm), showed that the fundamental frequencies observed ranged from 12 Hz to 75 Hz, as expected from the model. These results lay the foundation for the adoption of such sensors in different applications that need fine tactile information, such as an autonomous or teleoperated robotic hand, prostheses, and wearable devices.

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“…Figure 1 shows the MEQALAC concept. The key components required to develop a MEQALAC are an ion source, an ion extraction unit, focusing elements and accelerating stages [1][2][3][4]. Focusing elements are used to keep the beam in-line with the main direction of motion as self-repulsion of charged particles in the beam increases the beam diameter.…”

Section: Introductionmentioning

confidence: 99%

Waferscale electrostatic quadrupole array for multiple ION beam manipulation

Vinayakumar

Persaud

et al. 2018

2018 IEEE Micro Electro Mechanical Systems (MEMS)

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We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a waferbased accelerator architecture that lends itself to orders-ofmagnitude reduction in cost, volume and weight of charged particle accelerators. ESQs are a key building block in developing compact Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) [1]. In a MEQALAC electrostatic forces are used to focus ions, and electrostatic field scaling permits high beam current densities by decreasing the beam aperture size for a given peak electric field set by breakdown limitations. Using multiple parallel beams, each totaling to an area A, can result in higher total beam current compared to a single aperture beam of the same area. Smaller dimensions also allow for higher focusing electric field gradients and therefore higher average beam current density. Here we demonstrate that Deep Reactive Ion Etching (DRIE) micromachined pillar electrodes, electrically isolated by silicon-nitride thin films enable higher performance ESQA with waferscale scalability. The fabricated ESQA are able to hold up to1 kV in air. A 3×3 array of 12 keV argon ion beams are focused in a wafer accelerator unit cell to pave the way for multiple wafer accelerator.

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Enhanced lithium niobate pyroelectric ionizer for chip-scale ion mobility-based gas sensing

Cited by 12 publications

References 9 publications

Impact of Ag on the Limit of Detection towards NH3-Sensing in Spray-Coated WO3 Thin-Films

Impact of Ag on the Limit of Detection towards NH3-Sensing in Spray-Coated WO3 Thin-Films

Pyroelectrically Charged Flexible Ferroelectret-Based Tactile Sensor for Surface Texture Detection

Waferscale electrostatic quadrupole array for multiple ION beam manipulation

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