Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

Roberts, Nick A.; Fowlkes, Jason D.; Magel, Gregory A.; Rack, Philip D.

doi:10.1039/c2nr33014h

Cited by 56 publications

(55 citation statements)

References 56 publications

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“…39 In particular, in our prior work, a Raman laser was found to effectively locally ablate FEBID carbon deposits on various substrates. 27 Exploiting this idea, we utilized the Raman laser (514 nm Ar þ ion laser with 5.5 mW power) to selectively get rid of the parasitic halo carbon film.…”

Section: Articlementioning

confidence: 93%

Controlling the Physicochemical State of Carbon on Graphene Using Focused Electron-Beam-Induced Deposition

Kim¹,

Kulkarni²,

Davis³

et al. 2014

ACS Nano

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Focused electron-beam-induced deposition (FEBID) is a promising nanolithography technique using "direct-write" patterning by carbon line and dot deposits on graphene. Understanding interactions between deposited carbon molecules and graphene enables highly localized modification of graphene properties, which is foundational to the FEBID utility as a nanopatterning tool. In this study, we demonstrate a unique possibility to induce dramatically different adsorption states of FEBID-produced carbon deposits on graphene, through density functional theory calculations and complementary Raman experiments. Specifically, an amorphous carbon deposit formed by direct irradiation of high energy primary electrons exhibits unusually strong interactions with graphene via covalent bonding, whereas the FEBID carbon formed due to low-energy secondary electrons is only weakly interacting with graphene via physisorption. These observations not only are of fundamental importance to basic physical chemistry of FEBID carbon-graphene interactions but also enable the use of selective laser-assisted postdeposition ablation to effectively remove the parasitically deposited, physisorbed carbon films for improving FEBID patterning resolution.

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Section: Articlementioning

confidence: 93%

Controlling the Physicochemical State of Carbon on Graphene Using Focused Electron-Beam-Induced Deposition

Kim¹,

Kulkarni²,

Davis³

et al. 2014

ACS Nano

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“…9,17,24 Recently, van Dorp and colleagues investigated a range of novel Au complexes as candidates for FEBID Au precursors, yielding pristine deposits with a Au fraction of up to ∼40 atom %. 25 So far, purification approaches occurring during FEBID, such as in situ substrate heating, 9,26 deposition in reactive environments, 27,28 or, very recently, laserassisted FEBID, 29,30 have enhanced the metal content in deposits only moderately. Nevertheless, to achieve a major increase, additional laborious postdeposition purification steps are still required.…”

Section: ■ Introductionmentioning

confidence: 99%

Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures

Belić

Shawrav

Gavagnin

et al. 2015

ACS Appl. Mater. Interfaces

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Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures. Unfortunately, FEBID Au traditionally suffers from a high nonmetallic content and cannot meet the purity requirements for these applications. Here we report exceptionally pure pristine FEBID Au nanostructures comprising submicrometer-large monocrystalline Au sections. On the basis of high-resolution transmission electron microscopy results and Monte Carlo simulations of electron trajectories in the deposited nanostructures, we propose a curing mechanism that elucidates the observed phenomena. The in situ focused-electron-beam-induced curing mechanism was supported by postdeposition ex situ curing and, in combination with oxygen plasma cleaning, is utilized as a straightforward purification method for planar FEBID structures. This work paves the way for the application of FEBID Au nanostructures in a new generation of biosensors and plasmonic nanodevices.

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“…In this process, so-called laser-assisted electron-beam-induced deposition (LAEBID), synchronized laser pulses were used to assist intermittently in the thermal desorption of byproducts after each electron-beam pass. 47 This method was successful in improving deposit purity as well as spatial resolution of the direct write EBID process; however, LAEBID could not completely purify the deposits. To promote further purification of EBID patterns deposited from the MeCpPtMe 3 organometallic precursor, we recently demonstrated an in-chamber pulsed laser-induced oxidation purification process.…”

Section: ■ Introductionmentioning

confidence: 99%

Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits

Stanford

Lewis

Noh

et al. 2015

ACS Appl. Mater. Interfaces

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Electron-beam-induced deposition patterns, with composition of PtC5, were purified using a pulsed laser-induced purification reaction to erode the amorphous carbon matrix and form pure platinum deposits. Enhanced mobility of residual H2O molecules via a localized injection of inert Ar-H2 (4%) is attributed to be the reactive gas species for purification of the deposits. Surface purification of deposits was realized at laser exposure times as low as 0.1 s. The ex situ purification reaction in the deposit interior was shown to be rate-limited by reactive gas diffusion into the deposit, and deposit contraction associated with the purification process caused some loss of shape retention. To circumvent the intrinsic flaws of the ex situ anneal process, in situ deposition and purification techniques were explored that resemble a direct write atomic layer deposition (ALD) process. First, we explored a laser-assisted electron-beam-induced deposition (LAEBID) process augmented with reactive gas that resulted in a 75% carbon reduction compared to standard EBID. A sequential deposition plus purification process was also developed and resulted in deposition of pure platinum deposits with high fidelity and shape retention.

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Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

Cited by 56 publications

References 56 publications

Controlling the Physicochemical State of Carbon on Graphene Using Focused Electron-Beam-Induced Deposition

Controlling the Physicochemical State of Carbon on Graphene Using Focused Electron-Beam-Induced Deposition

Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures

Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits

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