More interestingly, the phase transition of VO 2 can be triggered by thermal, [7,8] electrical, [9,10] and optical stimuli [11][12][13][14][15][16] as well as strain, [17,18] making it very appealing to practical applications. Across the MIT, VO 2 changes from a monoclinic phase into a rutile phase. The insulating monoclinic phase has high THz transparency due to its low-density free carrier absorption, while the metallic rutile phase is opaque in the THz regime due to its high free carrier concentration (>10 21 cm −3 ). [19] The huge change of free carrier concentration across MIT gives rise to VO 2 's large M d in the THz regime; this characteristic is significant since there are very few natural materials with suitable optical properties for THz wave manipulation.For VO 2 -based THz switches and modulators, a very high laser intensity is normally required to trigger MIT. Émond et al. [12] reported a pump laser fluence of F th = 3.8 mJ cm −2 in order to trigger MIT of VO 2 /Al 2 O (11 3 02) films, while Cocker et al. [13] reported F th = 2 mJ cm −2 for VO 2 /Al 2 O (112 3 0) films. Hilton et al. [14] reported F th = 7 mJ cm −2 for a VO 2 /MgO(100) film, while Xiao et al. [15] reported the same value for VO 2 /SiO 2 films. The high F th values of VO 2 films are attributed to the facts that photoinduced heat accumulation or high concentration of photoinduced carriers are needed to trigger the MIT.The high optical trigger threshold F th of VO 2 films significantly increases the cost of VO 2 -based THz devices, so it is highly desirable to explore means to reduce F th of VO 2 films for applications to THz (opto)electronics. One way is to heat VO 2 films close to the phase transition temperature, T c . Cocker et al. [13] obtained a temperature-dependent phase diagram of ultrafast photoinduced MIT of VO 2 , and found that F th of VO 2 films decreases from 8 to 2 mJ cm −2 when the sample is heated from 41.2 to 295 K. However, relatively high F th is still needed to drive the MIT even at high temperatures. Pashkin et al. [16] reported a reduction in F th from 4.6 to 3.5 mJ cm −2 when a VO 2 /diamond film was heated from 295 to 320 K. Heating a VO 2 film to T c does reduce F th , but the effect is insignificant.Another approach to reduce F th is doping, which tunes T c closer to room temperature but also increases photoinduced carriers at a certain pump fluence. W is the most used element for VO 2 doping, highly effective in reducing T c and increasing Materials with low optical trigger threshold and large THz field modulation depth are highly desirable for THz switches and modulators. VO 2 , a classical strongly correlated oxide undergoing a sharp metal-insulator transition (MIT), is advantageous for its large THz field modulation depth by virtue of MIT. However, for optically triggered VO 2 -based THz switches and modulators, high pump laser intensity is normally required to trigger the MIT, adding considerable costs to THz systems. Reducing optical trigger threshold of VO 2 is of substantial interest in the THz scien...