2020
DOI: 10.1109/jsen.2020.2998826
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Enhanced Performance Love Wave Magnetic Field Sensors With Temperature Compensation

Abstract: Temperature compensation is critical and important for surface acoustic wave (SAW) magnetic field sensors. In this study, a Love wave mode based SAW device is investigated as a magnetic field sensor. The considered structure is composed of a CoFeB magnetostrictive film as sensitive layer, SiO2, and ZnO film as insulating and temperature compensation layers and ST+90°-cut quartz as substrate. A theoretical model is proposed to study the magnetic field sensitivity and temperature coefficient of frequency (TCF) v… Show more

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Cited by 24 publications
(7 citation statements)
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“…Hydrogen production from solid oxide is still in the research and development stage because the electrolysis process requires high temperature conditions and relatively harsh application conditions. Hydrogen production by solid polymer electrolysis has attracted more and more attention because of its compact structure, small volume, and high adaptability to electrolysis conditions [16].…”
Section: Type Of Electrolyticmentioning
confidence: 99%
“…Hydrogen production from solid oxide is still in the research and development stage because the electrolysis process requires high temperature conditions and relatively harsh application conditions. Hydrogen production by solid polymer electrolysis has attracted more and more attention because of its compact structure, small volume, and high adaptability to electrolysis conditions [16].…”
Section: Type Of Electrolyticmentioning
confidence: 99%
“…The first sensor explicitly exploiting the high sensitivity of Love waves was presented in 2018 reaching a limit of detection (LOD) of 250 pT/ at a frequency of 10 Hz [ 24 ]. Besides utilizing higher Love modes in the Gigahertz regime [ 25 ] also resonant surface acoustic Love wave magnetic field sensors have been introduced in the last three years [ 26 , 27 , 28 ]. Meanwhile, Love wave delay line sensors reach limits of detection as low as 70 pT/ at a frequency of 10 Hz [ 29 ].…”
Section: Introductionmentioning
confidence: 99%
“…However, the metallic nature of the Co-Fe-B layer makes it a good electrical conductor which generates leakage currents between the IDT fingers through the thin layer of ZnO thus increasing the propagation losses and noise in frequency response of the sensor. [33] The measured S 11 of the SAW resonator deposited Co-Fe-B is shown in Figure 8a. The base line of S 11 signal is around −1.7 dB and the amplitude decrease a lot due to the damping loss and parasitic capacitance after depositing the Co-Fe-B film.…”
Section: Sensor Characterization Under Temperaturesmentioning
confidence: 99%