Metal halide perovskites
have attracted tremendous attention due
to their excellent electronic properties. Recent advancements in device
performance and stability of perovskite solar cells (PSCs) have been
achieved with the application of self-assembled monolayers (SAMs),
serving as stand-alone hole transport layers in the p-i-n architecture.
Specifically, phosphonic acid SAMs, directly functionalizing indium–tin
oxide (ITO), are presently adopted for highly efficient devices. Despite
their successes, so far, little is known about the surface coverage
of SAMs on ITO used in PSCs application, which can affect the device
performance, as non-covered areas can result in shunting or low open-circuit
voltage. In this study, we investigate the surface coverage of SAMs
on ITO and observe that the SAM of MeO-2PACz ([2-(3,6-dimethoxy-9H-carbazol-9-yl)ethyl]phosphonic
acid) inhomogeneously covers the ITO substrate. Instead, when adopting
an intermediate layer of NiO between ITO and the SAM, the homogeneity,
and hence the surface coverage of the SAM, improve. In this work,
NiO is processed by plasma-assisted atomic layer deposition (ALD)
with Ni(MeCp)
2
as the precursor and O
2
plasma
as the co-reactant. Specifically, the presence of ALD NiO leads to
a homogeneous distribution of SAM molecules on the metal oxide area,
accompanied by a high shunt resistance in the devices with respect
to those with SAM directly processed on ITO. At the same time, the
SAM is key to the improvement of the open-circuit voltage of NiO +
MeO-2PACz devices compared to those with NiO alone. Thus, the combination
of NiO and SAM results in a narrower distribution of device performance
reaching a more than 20% efficient champion device. The enhancement
of SAM coverage in the presence of NiO is corroborated by several
characterization techniques including advanced imaging by transmission
electron microscopy (TEM), elemental composition quantification by
Rutherford backscattering spectrometry (RBS), and conductive atomic
force microscopy (c-AFM) mapping. We believe this finding will further
promote the usage of phosphonic acid based SAM molecules in perovskite
PV.