Enhanced stitching for the fabrication of photonic structures by electron beam lithography

Gnan, M.; Macintyre, D.; Sorel, Marc; Rue, R.M. De La; Thoms, S.

doi:10.1116/1.2800325

Cited by 18 publications

(6 citation statements)

References 12 publications

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“…In order to obtain a wide range of device functionality, the reduction of propagation losses in narrow wires is equally important, although there are still performance limitations determined by fabrication processes [9]. Recently losses as low as 0.92 dB/cm for a very narrow wire have been reported [10] through the use of hydrogen silsesquioxane (HSQ) resist and a reduction, through stage-tilt compensation techniques, of stitching errors produced during the electron-beam lithographic patterning process [11]. Compact single-row PhC structures embedded in PhW waveguide micro-cavities are essential components for wavelength selective devices, especially for possible application in WDM systems.…”

Section: Introductionmentioning

confidence: 99%

Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)

Zain¹,

Johnson²,

Sorel³

et al. 2008

Opt. Express

199

122

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We present experimental results on photonic crystal/photonic wire micro-cavity structures that demonstrate further enhancement of the quality-factor (Q-factor)--up to approximately 149,000--in the fibre telecommunications wavelength range. The Q-values and the useful transmission levels achieved are due, in particular, to the combination of both tapering within and outside the micro-cavity, with carefully designed hole diameters and non-periodic hole placement within the tapered section. Our 2D Finite Difference Time Domain (FDTD) simulation approach shows good agreement with the experimental results.

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Section: Introductionmentioning

confidence: 99%

Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)

Zain¹,

Johnson²,

Sorel³

et al. 2008

Opt. Express

199

122

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“…The EBL provides a low-cost, fast turn-around, foundry-compatible fabrication alternative that has been optimized [16][17][18] to produce consistent, robust, low-loss silicon photonic components 19 , making the transition to a costly foundry service with high confidence. Several test structures have been fabricated, for TE and TM polarization and for the case of identical pair of waveguides and not identical pair.…”

Section: Methodsmentioning

confidence: 99%

Study of waveguide crosstalk in silicon photonics integrated circuits

Donzella

Fard

Chrostowski

2013

Photonics North 2013

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Silicon photonics is going trough a terrific expansion driven by several applications, from chip wiring to integrated sensors and telecommunications. Some applications, e.g. intra and inter chip connections and sensing, require long parallel waveguides for wiring or for connecting grating couplers (GCs) to devices situated in sensing micro-channels. In well packed photonics chips there are often long wiring waveguides parallel for several mm, so loss can be caused by light coupled back and forth between them (cross-talk), by scattering, wall roughness, mode mismatch, etc. This work aims to investigate cross-talk for long parallel waveguides, and to propose methods to reduce cross-talk loss when high integration density is required.We have designed and fabricated about 200 testing structures exploiting e-beam on silicon on insulator (SOI) chip, in order to test several parameters and to find out dominant loss mechanisms. All devices have been tested and measured using an automatic optical bench, in the wavelength range between 1500-1600 nm.Achieved results are promising, since they allow for comparing cross-talk for short as well as long interaction lengths (up to 5 mm), different waveguide width pairs, several separation distances, and for TE and TM polarization. For smaller gaps, having not symmetric pair of waveguides is very beneficial, since it results in a lower power coupling, e.g. about 20/14 dB of crosstalk reduction for TE/TM waveguides after 5 mm of propagation and gap of 0.5 µm. This can be very useful for the design of integrated photonics chips requiring high-density packaging of devices and waveguides.

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“…2(b)) were realized on 220 nm SOI material from Soitech (Peabody, MA) and fabricated in the University of Washington's Microfabrication Facility (MFF) using a JEOL JBX-6300FS Direct Write E-Beam Lithography System (EBL) (Peabody, MA). The EBL provides a low-cost, fast turn-around, foundry-compatible fabrication alternative that has been optimized [28][29][30] to produce consistent, robust, low-loss silicon photonic components [31], making the transition to a costly foundry service with high confidence. Our test setup, shown in Fig.…”

Section: Methodsmentioning

confidence: 99%

Silicon photonic micro-disk resonators for label-free biosensing

Grist¹,

Schmidt²,

Flueckiger³

et al. 2013

Opt. Express

146

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Silicon photonic biosensors are highly attractive for multiplexed Lab-on-Chip systems. Here, we characterize the sensing performance of 3 µm TE-mode and 10 µm dual TE/TM-mode silicon photonic micro-disk resonators and demonstrate their ability to detect the specific capture of biomolecules. Our experimental results show sensitivities of 26 nm/RIU and 142 nm/RIU, and quality factors of 3.3x10(4) and 1.6x10(4) for the TE and TM modes, respectively. Additionally, we show that the large disks contain both TE and TM modes with differing sensing characteristics. Finally, by serializing multiple disks on a single waveguide bus in a CMOS compatible process, we demonstrate a biosensor capable of multiplexed interrogation of biological samples.

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Enhanced stitching for the fabrication of photonic structures by electron beam lithography

Abstract: Electron-beam lithography for photonic waveguide fabrication: Measurement of the effect of field stitching errors on optical performance and evaluation of a new compensation method

Cited by 18 publications

References 12 publications

Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)

Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)

Study of waveguide crosstalk in silicon photonics integrated circuits

Silicon photonic micro-disk resonators for label-free biosensing

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