Silicon photonic micro-disk resonators for label-free biosensing

Abstract

Silicon photonic biosensors are highly attractive for multiplexed Lab-on-Chip systems. Here, we characterize the sensing performance of 3 µm TE-mode and 10 µm dual TE/TM-mode silicon photonic micro-disk resonators and demonstrate their ability to detect the specific capture of biomolecules. Our experimental results show sensitivities of 26 nm/RIU and 142 nm/RIU, and quality factors of 3.3x10(4) and 1.6x10(4) for the TE and TM modes, respectively. Additionally, we show that the large disks contain both TE and TM modes with differing sensing characteristics. Finally, by serializing multiple disks on a single waveguide bus in a CMOS compatible process, we demonstrate a biosensor capable of multiplexed interrogation of biological samples.

Sensitivity of an optical sensor based on capillary microresonator for the measurement the hydrostatic pressure in microfluidics

“…These optical microresonators have been manufactured with different morphologies in the form of capillaries [1][2][3][4], discs [5], rings [6 -8], toroids [9], spheres [10], bubbles [11], bottles [12], etc, using different materials such as silicon, silica, polymers, with applications in areas such as biology [13], medicine [4], physics [14], chemistry [10] and specifically in the area of sensors for the measurement of temperature [15], humidity [12], refractive index [16] and some other physical variables of interest [6]. Specifically, the cylindrical optical microcavities that have been made using different types of materials, experience a series of resonances commonly known as Whispering Gallery modes WGMs, which are characteristic of the cavities that have rotational symmetry and can be explained through the phenomenon of total internal reflection occurring within these cavities when they are excited through an external source.…”

Improving the detection limit for on-chip photonic sensors based on subwavelength grating racetrack resonators

“…Various resonance structures have been proposed to optimize the performance of these sensors, including two-dimensional photonic crystal (PhC) micro-cavity resonators [1][2][3][4], one dimensional PhC nanobeam resonators [5][6][7][8], disk resonators [9,10], and ring resonators [11][12][13]. High sensitivity (S) is required in those sensors, which strongly depends on optical loss, light polarization, and the overlap between light and the surrounding material.…”

Evanescently Coupled Rectangular Microresonators in Silicon-on-Insulator with High Q-Values: Experimental Characterization

“…Regarding optical filters, the most common micro resonator shapes have been the ring resonator [3,4] and disk resonator [5,6] due to their high Q value of up to 10 7 with radius of 2.45 mm [7] and their feasibility to fabricate them with different materials [8][9][10]. Nevertheless, a shape that has a great potential is the rectangular resonator because the advantage of using them as filters is their smaller footprint requirement compared to the demonstrated ring resonators [7].…”