Enhancement in nanoscale electrical properties of lead zirconic titanate island fabricated by focused ion beam

Abstract

Articles you may be interested inSurface templates fabricated using a focused ion beam for lateral positioning of nanoscale islands on Si (001) substrates J. Vac. Sci. Technol. B 29, 04D106 (2011); 10.1116/1.3602112 Thickness effect on the dielectric, ferroelectric, and piezoelectric properties of ferroelectric lead zirconate titanate thin films Lead zirconic titanate ͑PZT͒ microscale island ͑1 m -100 nm͒ was fabricated by focused ion beam before its crystallization, followed by the annealing treatment at the crystallization temperature. Local electrical properties were evaluated by piezoresponse force microscopy technique. Compared to the PZT island fabricated after crystallization, the result shows that there is noticeable enhancement in nanoscale electrical properties of PZT island fabricated before crystallization, especially when the island size decreases. Raman spectra and Kelvin force microscopy result both show that there are little degradations on the PZT surface after this amorphous etching process. The mechanism will be discussed in this paper. These results are very beneficial to the development of the ferroelectric film applications in the dynamic random access memory, ferroelectric random access memory, and micro-electro-mechanical system field.

Ion‐Beam Etching on Nanostructured La2Ti2O7 Piezoelectric Thin Films

“…(a). In our previous works, similar measurements were performed on crystallized lead‐based piezoelectric films (PZT/Pt/TiO x /SiO 2 /Si) and showed a full degradation of piezoelectric properties, even from a relatively low ions dose of 4 × 10 13 ions/cm² . This was explained in terms of very strong damage due to ions implantation.…”

“…Piezoresponse force microscopy (PFM) in spectroscopic mode (recording of piezoloops) and Kelvin force microscopy (KFM) have been used to investigate the local electromechanical activity and the surface potential of the nanostructured film, respectively. For this, commercial scanning probe microscopes (Multimode for PFM and Dimension 3100 for KFM – Bruker, Billerica, MA) were used …”

Evaluation of Damages Induced by Ga+-Focused Ion Beam in Piezoelectric Nanostructures

“…This leads to a minor degradation at the surface, which is shown in the above Raman and KFM results. Finally, there is no ferroelectric domain in the amorphous PZT fi lm, and it is well known that the charged defects at the fi lm surface induced by the ion [ 25 ]. Copyright 2009, American Institute of Physics bombardment can limit the domain mobility and decrease the amplitude vibration (which will be proved by the results in Fig.…”

“…The surface potential maps are easily detected due to work function variation as a result of surface charges, electric dipoles, or absorption layer. KFM experiments were carried out by using a Pt-coated tip with a resonant frequency of 70-80 kHz and a spring constant of 1-5 N/m [ 25 ].…”

“…Pt electrode was used for allowing macroscopic electrical measurements. Similar MIM capacitors with LaNiO 3 bottom electrode have been fabricated by FIB, and the local electrical properties have also been probed [ 25 ]. Such oxide conductive electrodes are known to improve the electrical fatigue resistance of ferroelectrics [ 22 , 35 ].…”