2001
DOI: 10.1063/1.1420533
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Enhancement of oxidation rate of a-Si nanoparticles during dehydrogenation

Abstract: Oxidation of amorphous silicon (a-Si) nanoparticles grown by plasma-enhanced chemical vapor deposition were investigated. Their hydrogen content has a great influence on the oxidation rate at low temperature. When the mass gain is recorded during a heating ramp in dry air, an oxidation process at low temperature is identified with an onset around 250°C. This temperature onset is similar to that of hydrogen desorption. It is shown that the oxygen uptake during this process almost equals the number of hydrogen a… Show more

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Cited by 18 publications
(12 citation statements)
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“…This result is independent of the initial local environment. 7 On the other hand, we have reported in a recent work 22 that oxidation occurs at low temperature in our nanoparticles (TϽ300°C). Oxygen is mainly incorporated at dangling bond sites.…”
Section: Analysis and Discussionmentioning
confidence: 95%
“…This result is independent of the initial local environment. 7 On the other hand, we have reported in a recent work 22 that oxidation occurs at low temperature in our nanoparticles (TϽ300°C). Oxygen is mainly incorporated at dangling bond sites.…”
Section: Analysis and Discussionmentioning
confidence: 95%
“…This second thermogram was subtracted from the first one in order to correct it for the apparatus baseline. Due to the sensitivity of nanoparticles to low-temperature oxidation, 35 the sample mass was measured before and after the experiment. If after correction by the mass loss due to dehydrogenation a significant mass gain due to oxidation was detected, the thermogram was rejected.…”
Section: Methodsmentioning
confidence: 99%
“…In the case of nanoparticles, one possible explanation could be the contribution of the low-temperature oxidation process previously reported. 35 Although special care has been taken, a minor oxidation level could affect the measured enthalpy, owing to its highly exothermic character ͓9.32 eV/͑Si atoms͒ ͑Ref. 52͔͒.…”
Section: B Enthalpy Of Dehydrogenation Of the Low-temperature Processesmentioning
confidence: 99%
“…Great attention has been paid to remove oxygen from the DSC furnace atmosphere because oxidation is enhanced during dehydrogenation of a-Si:H. 7 For a "nominally" inert N 2 atmosphere, we always obtained a high exothermic signal extending up to the crystallization temperature ͑Ϸ700°C͒. 8,9 This signal disappeared when more inert conditions were used ͑higher N 2 flow rates͒ revealing a less intense signal containing endothermic contributions ͑Fig.…”
mentioning
confidence: 99%