2019
DOI: 10.1088/1361-6501/ab1d27
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Enhancing the metrological performance of non-raster scanning probe microscopy using Gaussian process regression

Abstract: Non-raster scanning has been proved to be an effective approach to dramatically improve the efficiency of the scanning probe microscopy without sophisticated scanners and controllers. However, the metrological performance of the method largely depends on the posterior data processing techniques which are responsible for recovering measured surfaces from non-gridded and subsampled data. This paper casts the surface reconstruction as a regression problem and proposes a Gaussian process regression model to study … Show more

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Cited by 12 publications
(13 citation statements)
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“…Accordingly, we present two methods for reconstructing sparse PFM spiral scans: 1) compressive sensing [ 54–60 ] (CS) and 2) Gaussian process [ 61–65 ] (GP) regression. The compressive sensing image inpainting algorithm requires two inputs: 1) The sparse and noisy measurements y , and 2) the scanning mask indicating sampled pixel locations.…”
Section: Introductionmentioning
confidence: 99%
“…Accordingly, we present two methods for reconstructing sparse PFM spiral scans: 1) compressive sensing [ 54–60 ] (CS) and 2) Gaussian process [ 61–65 ] (GP) regression. The compressive sensing image inpainting algorithm requires two inputs: 1) The sparse and noisy measurements y , and 2) the scanning mask indicating sampled pixel locations.…”
Section: Introductionmentioning
confidence: 99%
“…Dependent Gaussian process (DGP) [25][26][27] is an extension of the traditional Gaussian process (GP) [23,24]. GP is a well-known non-parametric Bayesian inference method and it captures various features of a specimen through a simple parameterization.…”
Section: Dependent Gaussian Process In Spmsmentioning
confidence: 99%
“…This paper presents a dependent Gaussian process (DGP) regression model for multi-frame semi-sparse image reconstruction, which is an extension of the ordinary Gaussian process (GP) regression model for single image reconstruction [23,24]. A dynamic process is scanned through the semi-sparse scanning pattern, such as sparse raster scanning pattern and sinusoidal scanning pattern.…”
Section: Introductionmentioning
confidence: 99%
“…However, the broad adoption of sparse scanning necessitates the development of algorithmic tools to achieve full information recovery. This is now an option thanks to the advent of machine learning image reconstruction algorithms such as compressed sensing (CS) 29 , convolutional neural networks 34 (CNN) or Gaussian process (GP) optimization 35,36 , which employ sparse data schemes with subsequent reconstruction of non-imaged areas. Combining sparse, nonrectangular scans, with such algorithms offer several advantages to SPM, including minimized perturbation to the system, extended probe life, and importantly their combination presents clear opportunities for faster image acquisition.…”
Section: Introductionmentioning
confidence: 99%