2004
DOI: 10.1063/1.1689004
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Environmental effects of H2O on fracture initiation in silicon: A hybrid electronic-density-functional/molecular-dynamics study

Abstract: A hybrid quantum-mechanical/molecular-dynamics simulation is performed to study the effects of environmental molecules on fracture initiation in silicon. A (110) crack under tension (mode-I opening) is simulated with multiple H2O molecules around the crack front. Electronic structure near the crack front is calculated with density functional theory. To accurately model the long-range stress field, the quantum-mechanical description is embedded in a large classical molecular-dynamics simulation. The hybrid simu… Show more

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Cited by 46 publications
(33 citation statements)
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“…De novo hierarchical simulations also have broad applications in nanoelectronics (Ogata et al 2004). The hybrid QM/MD simulation on the US-Japan Grid described in Section 4 has studied the SIMOX (separation by implantation by oxygen) technique for fabricating high speed and low power-consumption semiconductor devices.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…De novo hierarchical simulations also have broad applications in nanoelectronics (Ogata et al 2004). The hybrid QM/MD simulation on the US-Japan Grid described in Section 4 has studied the SIMOX (separation by implantation by oxygen) technique for fabricating high speed and low power-consumption semiconductor devices.…”
Section: Discussionmentioning
confidence: 99%
“…MRMD, F-ReaxFF, and EDC-DFT described above) to enable atomistic simulations that are otherwise too large to solve, while retaining QM accuracy (Broughton et al 1999;Nakano et al 2001;Ogata et al 2001Ogata et al , 2004. The EDC framework achieves this by using less compute-intensive coarse simulation as an embedding field.…”
Section: Adaptive Hierarchical Simulation Frameworkmentioning
confidence: 99%
“…In the EDC algorithms, spatially localized subproblems are solved in a global embedding field, which is efficiently computed with tree-based algorithms. Examples of the embedding field are 1) the electrostatic field in MD simulations [5], 2) the self-consistent Kohn-Sham potential [6] in the density functional theory (DFT) [7] in quantum-mechanical (QM) simulations [4], and 3) coarser but less computer-intensive models in hierarchical simulations that embed high-accuracy but computerintensive simulations within a coarse simulation only when and where high-fidelity is required [8,9].…”
Section: Scalable Parallel Molecular Dynamics Simulation Algorithmsmentioning
confidence: 99%
“…13 This framework consists of (1) a hierarchical division of the physical system into subsystems of increasing quality-of-solution (QoSn) requirements, S 0 ⊃ S 1 ⊃ ... ⊃ S n , and (2) a suite of simulation services, M R (R ) 0, 1, ..., n), of ascending order of accuracy (e.g., EFF < QEq < ReaxFF < QM). We have used the additive hybridization framework to perform (1) QM/EFF-MD simulations of crack initiation in Si in the presence of water molecules, 14 (2) EFF-MD/finite element (FE) simulations of stress distributions at Si/amorphous Si 3 N 4 interfaces, 15 and (3) QM/EFF-MD/FE simulations of oxidation in Si. 13 …”
Section: Hierarchical Simulation Frameworkmentioning
confidence: 99%