Since the outbreak of the severe
respiratory disease caused by the novel coronavirus (COVID-19), the
use of face masks has become ubiquitous worldwide to control the rapid
spread of this pandemic. As a result, the world is currently facing
a face mask shortage, and some countries have placed limits on the
number of masks that can be bought by each person. Although the surgical
grade N95 mask provides the highest level of protection currently
available, its filtration efficiency for sub-300 nm particles is around
85% due to its wider pore size (∼300 nm). Because the COVID-19
virus shows a diameter of around 65–125 nm, there is a need
for developing more efficient masks. To overcome these issues, we
demonstrate the development of a flexible, nanoporous membrane to
achieve a reusable N95 mask with a replaceable membrane and enhanced
filtration efficiency. We first developed a flexible nanoporous Si-based
template on a silicon-on-insulator wafer using KOH etching and then
used the template as a hard mask during a reactive ion etching process
to transfer the patterns onto a flexible and lightweight (<0.12
g) polymeric membrane. Pores with sizes down to 5 nm were achieved
with a narrow distribution. Theoretical calculations show that airflow
rates above 85 L/min are possible through the mask, which confirms
its breathability over a wide range of pore sizes, densities, membrane
thicknesses, and pressure drops. Finally, the membrane is intrinsically
hydrophobic, which contributes to antifouling and self-cleaning as
a result of droplets rolling and sliding on the inclined mask area.