2021
DOI: 10.3390/ma14040976
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Epitaxial Growth and Characterization of 4H-SiC for Neutron Detection Applications

Abstract: The purpose of this work is to study the 4H-SiC epitaxial layer properties for the fabrication of a device for neutron detection as an alternative material to diamond detectors used in this field. We have studied a high growth rate process to grow a thick epitaxial layer (250 µm) of 4H-SiC and, in order to estimate the quality of the epitaxial layer, an optical characterization was done through Photoluminescence (PL) spectroscopy for stacking fault defect evaluation. Micro Raman spectroscopy was used for simul… Show more

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Cited by 16 publications
(10 citation statements)
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“…From the literature, three additional peaks located at 420, 460 and 480 nm have been detected that provide evidence of recombination at various stacking faults [10][11][12]. Similarly, in other previous work, peaks at 390, 424 and 540 nm were observed from the PL mapping of a 4H-SiC sample.…”
Section: Property 3c-sic 4h-sic 6h-sicsupporting
confidence: 70%
“…From the literature, three additional peaks located at 420, 460 and 480 nm have been detected that provide evidence of recombination at various stacking faults [10][11][12]. Similarly, in other previous work, peaks at 390, 424 and 540 nm were observed from the PL mapping of a 4H-SiC sample.…”
Section: Property 3c-sic 4h-sic 6h-sicsupporting
confidence: 70%
“…2b it is possible to observe the diffusion length data, calculated using time resolved photoluminescence (TRPL) for the lifetime calculation. The diffusion length values are higher than the epi-layer thickness for our samples [12] with an optimized epitaxial process, while in the case of other epitaxial growth processes, the diffusion length is close to thickness of the epitaxial layer or even lower. Then with a good epitaxial process the diffusion length does not seems to be the limiting factor in the increase of the epitaxial layer thickness and of the neutron sensitivity.…”
Section: Resultsmentioning
confidence: 63%
“…Among the numerous SiC polytypes, 4H-SiC has been the power device choice due to the availability of high-quality epitaxial wafers . Due to the hexagonal lattice of 4H-SiC, anisotropies in the different crystal directions should be considered.…”
Section: Methods Descriptionmentioning
confidence: 99%
“…Among the numerous SiC polytypes, 4H-SiC has been the power device choice due to the availability of high-quality epitaxial wafers. 33 Due to the hexagonal lattice of 4H-SiC, anisotropies in the different crystal directions should be considered. In this model, the effect of anisotropy of the SiC crystal is considered in the phase field gradient constant ε, which depends on the angle of the interface θ:…”
Section: Initialmentioning
confidence: 99%