The defect structures of epitaxial films of ZnS evaporated onto NaCI in vacuum were studied by transmission electron microscopy. Included grains of doubly-positioned wurtzite-structure material were found in many of the monocrystalline sphalerite-structure films. No twins or wurtzite grains in other orientations were ever observed.Numerous {111} planar defects were present in the films that were grown free of included grains. Interaction between doubly diffracted electron beams, arising from the (11 1) streaks due to the planar defects and the direct beam produced characteristic systems of fine-scale fringes and dots which dominated the appearance of the micrographs. Annealing in vacuum and in H2S failed to eliminate the planar defects.