Epitaxial Growth of Oxide Films and Nanostructures

Tanaka, Hidekazu

doi:10.1016/b978-0-444-63304-0.00013-5

Cited by 10 publications

(6 citation statements)

References 125 publications

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“…However, photolithography needs to be conducted in labs with an ultra-clean experimental environment and highly skilled operators. 38 Wet-etched patterns are obtained by replacing UV light with an etching solution in the presence of a mask substrate. 39…”

Section: Materials and Approaches For Fabricating Liquid Biopsy Micro...mentioning

confidence: 99%

Latest advances and perspectives of liquid biopsy for cancer diagnostics driven by microfluidic on-chip assays

Xie

Wang

et al. 2023

Lab Chip

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Section: Materials and Approaches For Fabricating Liquid Biopsy Micro...mentioning

confidence: 99%

Latest advances and perspectives of liquid biopsy for cancer diagnostics driven by microfluidic on-chip assays

Xie

Wang

et al. 2023

Lab Chip

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“…Lithography is a commonly used traditional fabrication process that is relatively complex, costly, and suitable for mass production. The minimum size of graphics produced by lithography can be as small as nanometers, which is suitable for application scenarios that require very high accuracy [ 76 ]. The principle of lithography is to use a photoresist to transfer the pattern from the mask plate to the silicon wafer or other media layer and to obtain a specific pattern shape after exposure and development [ 77 ].…”

Section: Materials and Processes For Fabricating Flexible Sensorsmentioning

confidence: 99%

Manipulator Control System Based on Flexible Sensor Technology

Chen,

Wang,

Chen

et al. 2023

Micromachines

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The research on the remote control of manipulators based on flexible sensor technology is gradually extensive. In order to achieve stable, accurate, and efficient control of the manipulator, it is necessary to reasonably design the structure of the sensor with excellent tensile strength and flexibility. The acquisition of manual information by high-performance sensors is the basis of manipulator control. This paper starts with the manufacturing of materials of the flexible sensor for the manipulator, introduces the substrate, sensor, and flexible electrode materials, respectively, and summarizes the performance of different flexible sensors. From the perspective of manufacturing, it introduces their basic principles and compares their advantages and disadvantages. Then, according to the different ways of wearing, the two control methods of data glove control and surface EMG control are respectively introduced, the principle, control process, and detection accuracy are summarized, and the problems of material microstructure, reducing the cost, optimizing the circuit design and so on are emphasized in this field. Finally, the commercial application in this field is explained and the future research direction is proposed from two aspects: how to ensure real-time control and better receive the feedback signal from the manipulator.

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“…In this process, the photoresist material is irradiated with UV light through a photomask to form the required pattern. 127 In a similar way, a SAM pattern can be formed on the substrate without using a photoresist material by irradiating the SAM layer though the photomask (see Fig. 21).…”

Section: Self-assembled Monolayers For Patterningmentioning

confidence: 99%