Graphene is a promising material for applications as a channel in graphene fieldeffect transistors (GFETs) which may be used as a building block for optoelectronics, high-frequency devices and sensors. However, these devices require gate insulators which ideally should form atomically flat interfaces with graphene and at the same time contain small densities of traps to maintain high device stability. Previously used amorphous oxides, such as SiO 2 and Al 2 O 3 , however, typically suffer from oxide