Epitaxial metallic β-Nb₂N films grown by MBE on hexagonal SiC substrates

Abstract

RF-plasma MBE was used to epitaxially grow 4- to 100-nm-thick metallic β-Nb2N thin films on hexagonal SiC substrates. When the N/Nb flux ratios are greater than one, the most critical parameter for high-quality β-Nb2N is the substrate temperature. The X-ray characterization of films grown between 775 and 850 °C demonstrates β-Nb2N phase formation. The (0002) and X-ray diffraction measurements of a β-Nb2N film grown at 850 °C reveal a 0.68% lattice mismatch to the 6H-SiC substrate. This suggests that β-Nb2N can be used for high-quality metal/semiconductor heterostructures that cannot be fabricated at present.

Microstructure, mechanical properties and oxidation behaviors of magnetron sputtered NbNx coatings

“…3 shows the fitted XPS spectra of N 1s on the surface of the as-deposited coatings deposited at P N2 of 5%, 10% and 20%. The binding energies of the N 1s shown in the coatings at P N2 of 5% and 20% are located at 397.0 and 397.4 eV, which are consistent with the previously reported values of Nb 2 N [29] and NbN [28], respectively. For the coatings at P N2 of 10%, the fitted two peaks in N 1s spectrum are attributed to the mixture of Nb 2 N and NbN, which agrees well with the results of Nb 3d spectrum in Fig.…”

“…In Fig. 2(a), the peaks at 201.8 and 204.5 eV are associated with Nb 3d 5/2 and Nb 3d 3/2 of pure Nb [29]. In Fig.…”

“…In Fig. 2(b), the spectrum of the coating at P N2 of 5% shows two sharp peaks at binding energies of 202.7 and 205.4 eV, which correspond to Nb 3d 5/2 and Nb 3d 3/2 of Nb 2 N [29]. Two doublets in Fig.…”

“…All the Nb 3d peaks were fitted as pairs of spineorbit split sub-peaks with a separation of 2.7 eV between the Nb 3d 5/2 and Nb 3d 3/2 components. The ratio of the area of the 3d 5/2 component over that of the 3d 3/2 component was fixed at 3:2 [28,29]. In Fig.…”

InGaN/GaN nanowires epitaxy on large-area MoS2 for high-performance light-emitters

“…By combining the advantages of nitride nanowires and layered TMDCs on metal, the platform will provide solutions for cross-disciplinary applications, such as high-power light-emitters, bio-sensing, energy harvesting, solar water-splitting, and nitrides/TMDCs/metal electronics that can surpass the conventional limitation in heterogeneous integration. 65 Author contributions…”