1974
DOI: 10.1049/el:19740352
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Epitaxially grown double-drift silicon IMPATT diodes at 60 To 90 GHz

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Cited by 7 publications
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“…The p+n junction is formed by a shallow, 4OKeV, boron ion implantation dose of 5 x 1o14 ions/cm2, which is subsequently driven in approximately 3.3 microns to produce a graded p+n interface (1). For optimum X-band performance, diodes were found to have an effective active layer width of 0.2 -0.4 microns, as estimated by an optical interference method (2,3), and a breakdown voltage of 28-36 Volts.…”
Section: Introductionmentioning
confidence: 99%
“…The p+n junction is formed by a shallow, 4OKeV, boron ion implantation dose of 5 x 1o14 ions/cm2, which is subsequently driven in approximately 3.3 microns to produce a graded p+n interface (1). For optimum X-band performance, diodes were found to have an effective active layer width of 0.2 -0.4 microns, as estimated by an optical interference method (2,3), and a breakdown voltage of 28-36 Volts.…”
Section: Introductionmentioning
confidence: 99%