2010
DOI: 10.1016/j.apsusc.2009.10.019
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EPMA–EDS surface measurements of interdiffusion coefficients between miscible metals in thin films

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Cited by 8 publications
(6 citation statements)
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“…The dependence of several EDX parameters on beam energy using electron probe microanalysis on metallic films has been studied before [21][22][23][24][25]. Monte Carlo simulations were used to predict electron trajectories in samples with known structure and composition [23][24][25], based on theoretical probability distributions or empirical models.…”
Section: Introductionmentioning
confidence: 99%
“…The dependence of several EDX parameters on beam energy using electron probe microanalysis on metallic films has been studied before [21][22][23][24][25]. Monte Carlo simulations were used to predict electron trajectories in samples with known structure and composition [23][24][25], based on theoretical probability distributions or empirical models.…”
Section: Introductionmentioning
confidence: 99%
“…EPMA permits one to analyze the composition of homogeneous materials in a region of few microns from the surface. The EPMA can be conducted using two different approaches: wavelength dispersive X-ray spectroscopy (WDS) [141] or energy dispersive X-ray spectroscopy [142][143][144][145][146]. WDS is generally considered an excellent method for microanalysis because is more sensitive and has a higher resolution than EDS, but it is more expensive and needs a dedicated device.…”
Section: Electron Probe Microanalysismentioning
confidence: 99%
“…EPMA was used by some authors to evaluate critical information about layered samples besides their thickness. Christien [145] used EDS measurement to determine the interdiffusion coefficient between thin films of miscible metals. Using various annealing temperature and Fick's diffusion equations, he was able to estimate the coefficients for an Ni film on Pd.…”
Section: Electron Probe Microanalysismentioning
confidence: 99%
“…EPMA permits us to analyse the compositions of homogeneous materials in a region of few microns from the surface. The EPMA can be conducted using two different approaches: wavelength dispersive X-ray spectroscopy (WDS) [115] or energy-dispersive X-ray spectroscopy (EDS) [116][117][118][119][120]. WDS is generally considered an excellent method for microanalysis because it is more sensitive and has a higher resolution than EDS, but it is more expensive and needs a dedicated device.…”
Section: Electron Probe Microanalysismentioning
confidence: 99%
“…EPMA was used by some authors to evaluate important information about layered samples besides their thickness: Christien [119] used the EDS measurement to determine the interdiffusion coefficient between thin films of miscible metals. Using various annealing temperatures and the Fick's diffusion equations, he was able to estimate the coefficients for a Ni film on Pd.…”
Section: Electron Probe Microanalysismentioning
confidence: 99%