2015
DOI: 10.1107/s1600576715005762
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Error analysis of the crystal orientations and disorientations obtained by the classical electron backscatter diffraction technique

Abstract: The fidelity – that is, the error, precision and accuracy – of the crystallographic orientations and disorientations obtained by the classical two-dimensional Hough-transform-based analysis of electron backscatter diffraction patterns (EBSPs) is studied. Using EBSPs simulated based on the dynamical electron diffraction theory, the fidelity analysis that has been previously performed using the patterns simulated based on the theory of kinematic electron diffraction is improved. Using the same patterns, the effi… Show more

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Cited by 56 publications
(44 citation statements)
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“…• , which has been confirmed by experimental 40 measurements [15]. For tilted samples, distortion of EBSD images has been pointed out [16,17], and a geometric transformation has been proposed to correct the distortion based on SEM images on non tilted samples.…”
Section: Introductionmentioning
confidence: 63%
See 1 more Smart Citation
“…• , which has been confirmed by experimental 40 measurements [15]. For tilted samples, distortion of EBSD images has been pointed out [16,17], and a geometric transformation has been proposed to correct the distortion based on SEM images on non tilted samples.…”
Section: Introductionmentioning
confidence: 63%
“…The surface is normal to the electron beam for BSE images 15 and is subsequently tilted for EBSD imaging. Matching the coordinates system of the two images is an issue seldom reported in the literature.…”
Section: Introductionmentioning
confidence: 99%
“…Orientation maps in Figure 9 Finally, for quality assurance the XCF peak height map for matching is also presented ( Figure 9 & 10 part H) and this can be used as a filtering metric for removing suspect points, similar to the image quality in the Hough based method [33]. The red x on the map in A shows the location the pattern was extracted from.…”
Section: Si Single Crystalmentioning
confidence: 99%
“…Similar approach for calibration or solving pseudosymmetry problems can be seen in some publications [27][28][29], although the systematic analysis on the calibration error, accuracy and precision has not yet been reported. Global optimisation 1 The terms, error, accuracy and precision, defined in [26] are used throughout this paper. The error is the difference between a true quantity and the measured one.…”
Section: Introductionmentioning
confidence: 99%