Etching of Metals and Insulators

Bäuerle, D.

doi:10.1007/978-3-642-17613-5_14

Laser Processing and Chemistry 2011

DOI: 10.1007/978-3-642-17613-5_14

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Etching of Metals and Insulators

D. Bäuerle

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2013

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References 37 publications

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Production of energetic neutral particles and low energy electrons from four anode rods ion source

Mostafa

El‐Khabeary

Reheem

2013

Review of Scientific Instruments

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The factors affecting the energetic neutral current, the low energy electron current, and the positive ion current emerging from a four-anode-rods ion source have been studied using argon gas. The neutral and electron current were measured using a simple, new technique. It was found that the energetic neutral current and the electron current depend on the positive ion current and the gas pressure. The ratio of the neutral and electron current to the positive ion current increases by increasing the gas pressure. Also it was found that at a pressure equal to 9 × 10(-4) mmHg, the ratio of the neutral to the positive ion current reaches 2.34 while the ratio of the electron current to the positive ion current reaches 1.7.

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Production of energetic neutral particles and low energy electrons from four anode rods ion source

Mostafa

El‐Khabeary

Reheem

2013

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

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Etching of Metals and Insulators

Cited by 1 publication

References 37 publications

Production of energetic neutral particles and low energy electrons from four anode rods ion source

Production of energetic neutral particles and low energy electrons from four anode rods ion source

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