“…According to Stroms et al,11) in the case of H, C, and O elements, more precise results can be obtained using a Cs þ ion beam, because their relative ion yields using this beam are several thousands times higher than those in the case of using an O À ion beam. On the other hand, in the case of metallic elements such as Al, Si, Ti and Fe, that are positively ionized, an O À ion bombardment is currently used in SIMS analysis to produce high positive ion yield providing greater analytical sensitivity.…”