Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes

Symbiotic Simulation Control in Semiconductor Manufacturing

“…In semiconductor manufacturing, a wet bench is used to clean wafers after certain fabrication steps to yield higher wafer reliability [15], [19]. A wet bench tool consists of a number of baths which contain chemical liquids and process wafer lots according to recipes.…”

Modifications of surface materials and their effects on cleanability as studied by radiochemical methods

“…Radiochemical methods have also been used to compare the efficiencies of detergents on PVC, chromium and steel surfaces (Table 1) and cleaning methods for removing metallic impurities , Lu et al 2000, Wang et al 2001). In addition, radiochemical methods have been used in laundering studies (Morris andPrato 1985, Shebs 1987).…”

“…Sensitive to humidity and temperature, lower energy resolution Ohlson and Wäänänen 1971, Jokelainen and Uusi-Rauva 1976a, 1976b, 1979, Jokelainen et al 1982, Pesonen-Leinonen et al 2006a HPGe-detector Surface High energy resolution Low detection efficiency Wang et al 1999, Lu et al 2000 Radiochemical model soils consist of bulk soil matter, labelled radioisotope and solvent. The model soils used should contain typical components of the environment of the evaluated materials.…”

“…By using different radio-isotopes, cleanabilities of different components of model soils can be examined. Different particle components, 51 Cr and 56 Mn, are used to label particle model soils, whereas 14 C and 3 H are normally used to label oil model soils ( , Lu et al 2000, Wang et al 2001). The selected isotope should have a half-life long enough to be suitable for measurements.…”

Application of radiochemical determination methods in cleanability research of building materials

“…Radiochemical methods have also been used to compare the cleaning efficiencies of detergents on PVC, chromium and steel surfaces (Benvenuti et al, 1999) and to compare cleaning methods for removing metallic impurities (Lu et al, 2000;Wang et al, 1999Wang et al, , 2001. In addition, radiochemical methods have been used in some laundering studies (Morris and Prato, 1985;Shebs, 1987).…”