Evaluation of mechanical damage by high resolution x-ray diffraction and minority carrier recombination lifetime in silicon wafer

Abstract

High effective minority carrier lifetime on silicon substrates using quinhydrone-methanol passivation Appl. Phys. Lett. 96, 063502 (2010); 10.1063/1.3309595 Epitaxial silicon minority carrier diffusion length by photoluminescence J. Appl. Phys. 104, 054503 (2008); 10.1063/1.2973461Modelling the ultraviolet irradiation effect on the effective minority carrier recombination lifetime of silicon wafers J. Appl. Phys. 85, 994 (1999); 10.1063/1.369220 Recombination characteristics of minority carriers near the Al x O y / GaAs interface using the light beam induced current techniqueIn Czochralski silicon wafers, the effect of mechanical back side damage was systematically analyzed by x-ray diffuse scattering and minority carrier recombination lifetime measurements. X-ray section topography and wet oxidation/preferential etch methods were also employed. A liquid honing method was used to induce mechanical damage, and the damage grade was varied by controlling process parameters. A high resolution x-ray analysis of the samples was carried out before and after heat treatment at 1100°C for 60 min. The magnitude of diffuse scattering was analyzed quantitatively by integrating the excess intensity of diffuse scattering into a reciprocal space map and its correlation with the mechanical damage was examined. As the grade of mechanical damage increased, the degree of diffuse scattering increases and minority carrier recombination lifetime decreases, suggesting the generation of more defects. We discuss other experimental results from the viewpoint of the structure-property relationship.

Statistical continuum damage healing mechanics (SCDHM)

“…It is worth noting that experimental techniques such as Acoustic Emission, X-ray Diffraction, Computed Tomography (CT), Scanning Electron Microscopy (SEM) and Digital Image Correlation (DIC) are common testing techniques for statistical damage measurements (Choi et al., 1998; Hild et al., 2015). Chen (Chen, 2020) carried out a series of X-ray diffraction to investigate brittle rock statistical properties.…”