Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

Gulbiński, W.; Mathur, Sanjay; Shen, H.; Suszko, T.; Gilewicz, A.; Warcholiński, B.

doi:10.1016/j.apsusc.2004.05.278

Cited by 143 publications

(77 citation statements)

References 20 publications

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“…Between these contributions C-Si bonds, at 282.5 eV, are expected. For nanocomposite Ti-C materials additional contributions have also been reported in this region [37,38,39,40,41,42,43,44], which have been associated with several different causes, including ion beam sputtering damage [42], and an interfacial state between nc-TiC and a-C phase [12,40,41,43]. Such contribution can hence not be excluded in the present samples, and is indicated in Figure 4 by TiC*.…”

Section: The Influence Of the Target-to-substrate Distance And Pressurementioning

confidence: 82%

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

Lauridsen

Eklund

Joelsson

et al. 2010

Surface and Coatings Technology

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2 transport of the species. Increased target-to-substrate distance from 2 cm to 8 cm resulted in a higher carbon-to-titanium ratio in the coatings than for the Ti 3 SiC 2 compound target, due to different gas-phase scattering properties between the sputtered species. The coatings microstructure could be modified from nanocrystalline to predominantly amorphous by changing the pressure and target-to-substrate conditions to 4 mTorr and 2 cm, respectively. A decreased pressure from 10 mTorr to 4 or 2 mTorr at a target-tosubstrate distance of 2 cm decreased the deposition rate up to a factor of ~7 as explained by resputtering and an increase in the plasma sheath thickness. The coatings exhibited electrical resistivity in the range 160-800 µΩcm, contact resistance down to 0.8 mΩ at a contact force of 40 N, and nanoindentation hardness in the range 6-38 GPa.

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Section: The Influence Of the Target-to-substrate Distance And Pressurementioning

confidence: 82%

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

Lauridsen

Eklund

Joelsson

et al. 2010

Surface and Coatings Technology

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“…By tuning the TiC grain size and fraction of a-C matrix, the properties can be controlled as the matrix phase increases the toughness of the material and softens the nanocomposite compared to pure carbides but also provides a source of solid lubricant. [2][3][4][5][6][7][8] The nc-TiC has a NaCl crystal structure and its bonding is a mixture of covalent, ionic and metallic bonds where the covalent contribution consists of Ti e g -C 2p ͑pd ͒, Ti t 2g -C 2p ͑pd ͒, and Ti-Ti t 2g ͑dd ͒ bonds, 9 which are all found in the valence band.…”

Section: Introductionmentioning

confidence: 99%

“…In the nanocomposite C 1s spectrum, an additional shoulder is observed at about ϳ283 eV binding energy between the C-C and Ti-C peaks, which we denote C-Ti ‫ء‬ . 3,7,[11][12][13][14][15][16] The intensity of this additional feature increases upon sputter etching. 17 However, recent studies with high-energy XPS have shown that it is present also in unsputtered samples.…”

Section: Introductionmentioning

confidence: 99%

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

et al. 2009

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The electronic structure of nanocrystalline ͑nc-͒ TiC/amorphous C nanocomposites has been investigated by soft x-ray absorption and emission spectroscopy. The measured spectra at the Ti 2p and C 1s thresholds of the nanocomposites are compared to those of Ti metal and amorphous C. The corresponding intensities of the electronic states for the valence and conduction bands in the nanocomposites are shown to strongly depend on the TiC carbide grain size. An increased charge transfer between the Ti 3d-e g states and the C 2p states has been identified as the grain size decreases, causing an increased ionicity of the TiC nanocrystallites. It is suggested that the charge transfer occurs at the interface between the nanocrystalline-TiC and the amorphous-C matrix and represents an interface bonding which may be essential for the understanding of the properties of nc-TiC/amorphous C and similar nanocomposites.

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“…Therefore increasing of the acetylene supply flow results in continuous phase change from Ti-rich Ti/TiC (zone I) to mainly single phase TiC (zone II) and finally to carbon-rich TiC/C(zone III). The evolution of the target state is similar to phase changes in the growing TiC/C films with increase carbon content as can be found for example in [10,35].…”

Section: The State Of the Targetmentioning

confidence: 48%

“…Hybrid PVD-PECVD process is being used for synthesis of metal hydrogenated carbon nanocomposite (MeC/C(:H)) [6,[8][9][10][11][12][13] layers or DLC layers doped with metal (DLC:Me) [14][15][16][17]. For example nc-WC/a-C:H [18][19][20][21] or nc-TiC/a-C:H [9,[22][23][24] are reported to have good mechanical and tribological properties combining high hardness, good toughness with low friction coefficient and wear which makes these materials industrially attractive for different applications.…”

Section: Introductionmentioning

confidence: 99%

Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

Schmidtová

Souček

Kudrle

et al. 2013

Surface and Coatings Technology

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a b s t r a c t a r t i c l e i n f oHybrid PVD-PECVD process of titanium sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon (PECVD). This process can be used for preparation of metal carbon nanocomposites (MeC/C(:H)) or DLC layers doped with metal (DLC:Me). The aim of this paper is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. A non-monotonous dependence of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow is reported. Explanation of nonmonotonous evolutions through the analysis of the target state correlating the process characteristics with properties of coatings prepared by this process is proposed.

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Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

Cited by 143 publications

References 20 publications

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

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