2012
DOI: 10.1109/tuffc.2012.2412
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Evaluation of polarization of embedded piezoelectrics by the thermal wave method

Abstract: This work demonstrates the benefit of the thermal wave method for the evaluation of the polarization state of embedded piezoelectrics. Two types of samples were investigated: A low-temperature co-fired ceramics (LTCC)/lead zirconate titanate (PZT) sensor-actuator and a macro-fiber composite (MFC) actuator. At modulation frequencies below 10 Hz, the pyroelectric response was governed by thermal losses to the embedding layers. Here, the sample behavior was described by a harmonically heated piezoelectric plate e… Show more

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Cited by 12 publications
(5 citation statements)
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“…There is only a small difference to the Cole-Davidson-model in [2] characterizing a relaxation time distribution with β = 0.83. The thermal relaxation time amounts to 0.16 s resulting in a thermal conductance at the PZT/LTCC interface of 3083 W/m²K which is almost the same value as reported in [1]. The imaginary part is additionally shifted down by approximately 0.1 nA.…”
Section: B) Ltcc/pzt Sensor-actuatorsupporting
confidence: 74%
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“…There is only a small difference to the Cole-Davidson-model in [2] characterizing a relaxation time distribution with β = 0.83. The thermal relaxation time amounts to 0.16 s resulting in a thermal conductance at the PZT/LTCC interface of 3083 W/m²K which is almost the same value as reported in [1]. The imaginary part is additionally shifted down by approximately 0.1 nA.…”
Section: B) Ltcc/pzt Sensor-actuatorsupporting
confidence: 74%
“…Measurement results for the LTCC/PZT sensor-actuator and the MFC actuator using AC coupling with a cut-off frequency of 1 Hz have been previously described in [1]. In this case, signals at lower frequencies were suppressed and the phase was changed.…”
Section: B) Ltcc/pzt Sensor-actuatormentioning
confidence: 99%
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“…In the case of LIMM, we consider a harmonically heated piezoelectric plate exhibiting heat losses to the environment, characterised by a thermal relaxation time τ th (Suchaneck et al, 2012). The steady-state periodic solution of this problem in the form of an infinite series is given by Bauer and Ploss (1990) and Carslaw and Jaeger (1959):…”
Section: Laser Intensity Modulation Methodsmentioning
confidence: 99%
“…1 To ensure the functionality of the integrated piezoelectric modules after the fabrication process, the polarisation state is determined non-destructively by thermal wave methods. 2 The devices are irradiated by a modulated laser beam, and the time or frequency dependences of the pyroelectric current are recorded, which provide insight into the polarisation distribution.…”
Section: Introductionmentioning
confidence: 99%