2007 Digest of Papers Microprocesses and Nanotechnology 2007
DOI: 10.1109/imnc.2007.4456204
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Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD

Chiaki Minari
1
,
Reo Kometani
2
,
Ken−ichiro Nakamatsu
3
et al.
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