2016
DOI: 10.1109/tim.2016.2596038
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Evaluation of Self-Mixing Interferometry Performance in the Measurement of Ablation Depth

Abstract: Abstract-This paper studies self-mixing interferometry (SMI) for measuring ablation depth during laser percussion drilling of TiAlN ceramic coating. The measurement performance of SMI was investigated in a large processing range producing blind microholes with depths below and beyond the average coating thickness. Signal characteristics of the measurement system were evaluated indicating sources of disturbance. The SMI measurements were compared with a conventional measurement device based on focus variation m… Show more

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Cited by 23 publications
(17 citation statements)
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“…29 The four basic measurements outlined above can be considered as the building blocks of many additional applications, in mechanical engineering as well as in other field of physical measurements and of biology or medicine. 21 For example, the basic displacement scheme can be finalized to: (i) the real-time measurement of ablation depth 30 and (ii) become a velocimeter 31 when we look at the frequency content of the interferometric phase measured by the SMI, ϕ ¼ 2 ks, (k ¼ 2π∕λ being the wavenumber) whose time derivative dϕ∕dt ¼ 2 kds∕dt is just proportional to velocity, and also (iii) a flow meter [32][33][34][35] when we aim to a fluid in flow in front of the SMI, and (iv) a thickness meter. 36,37 Further applications have been successfully demonstrated and, for sake of saving space, we address the reader to a review paper 38 on SMI for a more exhaustive overview.…”
Section: 23)mentioning
confidence: 99%
“…29 The four basic measurements outlined above can be considered as the building blocks of many additional applications, in mechanical engineering as well as in other field of physical measurements and of biology or medicine. 21 For example, the basic displacement scheme can be finalized to: (i) the real-time measurement of ablation depth 30 and (ii) become a velocimeter 31 when we look at the frequency content of the interferometric phase measured by the SMI, ϕ ¼ 2 ks, (k ¼ 2π∕λ being the wavenumber) whose time derivative dϕ∕dt ¼ 2 kds∕dt is just proportional to velocity, and also (iii) a flow meter [32][33][34][35] when we aim to a fluid in flow in front of the SMI, and (iv) a thickness meter. 36,37 Further applications have been successfully demonstrated and, for sake of saving space, we address the reader to a review paper 38 on SMI for a more exhaustive overview.…”
Section: 23)mentioning
confidence: 99%
“…ELF-MIXING (SM) or optical feedback interferometry [1,2], is being increasingly employed for measuring displacement [3,4], distance [5,6], velocity [7], vibration [8], flow [7], and refractive index [9] etc. providing compact, lowcost, contactless, and self-aligned instrumentation.…”
Section: Introductionmentioning
confidence: 99%
“…S elf-mixing interferometry (SMI) in laser diodes (LD) is a wellknown measurement technique [1][2][3], used in instrument for vibration and displacement analysis of a remote target [4][5][6][7][8][9][10][11], and for the measurement of LD parameters [12][13]. SMI has been employed successfully in industrial [14][15][16][17], biomedical [18,19] and consumer applications [20]. In an SMI, the weak optical back-reflection from a remote target reentering the LD cavity perturbs the optical field, generating modulations of it.…”
Section: Introductionmentioning
confidence: 99%