Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

Namazu, Takahiro; Isono, Yoshitada; Tanaka, Tomoki

doi:10.1109/84.896765

Cited by 366 publications

(246 citation statements)

References 18 publications

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“…3͑d͒ was calculated and treated as the spring constant of the nanowire. Based on the assumption that the nanowire follows the linear elastic theory of an isotropic material, the elastic modulus of the SiO 2 nanowire, E n , can be calculated from 35,37 …”

Section: Fig 3 ͑Color Online͒ ͑A͒mentioning

confidence: 99%

Elastic modulus of amorphous SiO2 nanowires

Gao

2006

Applied Physics Letters

147

106

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Amorphous SiO2 nanowires with diameter ranging from 50 to 100 nm were synthesized using chemical vapor deposition (CVD) under an argon atmosphere at atmospheric pressure. Nanoscale three-point bending tests were performed directly on individual amorphous SiO2 nanowires using an atomic force microscope (AFM). Elastic modulus of the amorphous SiO2 nanowires was measured to be 76.6±7.2GPa, which is close to the reported value of the bulk SiO2 and thermally grown SiO2 thin films, but lower than that of plasma-enhanced CVD SiO2 thin films. The amorphous SiO2 nanowires exhibit brittle fracture failure in bending.

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Section: Fig 3 ͑Color Online͒ ͑A͒mentioning

confidence: 99%

Elastic modulus of amorphous SiO2 nanowires

Gao

2006

Applied Physics Letters

147

106

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“…Namazu et al 7 have found an average bending strength of 17.5 ( 0.3 GPa for micromachined silicon beams (along [111] direction) of 6 µm length and around 250 nm in diameter. This corresponds to a scatter of (2%, whereas for five of our NWs which have the same length of about 800 nm, the scatter is (15%.…”

mentioning

confidence: 99%

“…No change in Young's modulus, but an increase in bending strength by a factor of up to 38 was observed from the millimeter down to the nanometer scale. 7 AFM measurements were also done on silicon NWs (from 10 to 100 nm in diameter, grown along the [111] direction) where a bending modulus of 186 GPa (188 GPa in bulk) was measured. 8 For NWs of gold 9 and silicon carbide, 10 no dependence of the bending modulus on size was observed, but a fracture strength approaching the predicted theoretical maximum 11 of E/10 was measured for nanoscale objects, where E is the Young's modulus.…”

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confidence: 99%

Measurement of the Bending Strength of Vapor−Liquid−Solid Grown Silicon Nanowires

et al. 2006

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The fracture strength of silicon nanowires grown on a [111] silicon substrate by the vapor−liquid−solid process was measured. The nanowires, with diameters between 100 and 200 nm and a typical length of 2 µm, were subjected to bending tests using an atomic force microscopy setup inside a scanning electron microscope. The average strength calculated from the maximum nanowire deflection before fracture was around 12 GPa, which is 6% of the Young's modulus of silicon along the nanowire direction. This value is close to the theoretical fracture strength, which indicates that surface or volume defects, if present, play only a minor role in fracture initiation.

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“…Few researchers have measured mechanical properties of nanoscale structures using AFM (Namazu et al 2000; and nanoindentation Wei et al 2005;Palacio et al 2007 schematic showing the generation of friction and wear points due to the interaction of an implanted biomolecule layer on a biosensor with living tissue (Bhushan et al 2006a). has been performed to analyse the effect of types of surface roughness and scratches on stresses in nanostructures (Bhushan & Agrawal 2002.…”

Section: (A ) Examples Of Devices With Tribological Issues In Mems/nementioning

confidence: 99%

Nanotribology and nanomechanics in nano/biotechnology

Bhushan

2008

Phil. Trans. R. Soc. A.

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Owing to larger surface area in micro/nanoelectromechanical systems (MEMS/NEMS), surface forces such as adhesion, friction, and meniscus and viscous drag forces become large when compared with inertial and electromagnetic forces. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. For BioMEMS/BioNEMS, adhesion between biological molecular layers and the substrate, and friction and wear of biological layers may be important, and methods to enhance adhesion between biomolecules and the device surface need to be developed. There is a need for development of a fundamental understanding of adhesion, friction/stiction, wear, the role of surface contamination and environment, and lubrication. MEMS/NEMS materials need to exhibit good mechanical and tribological properties on the micro/nanoscale. Most mechanical properties are known to be scale dependent. Therefore, the properties of nanoscale structures need to be measured. Componentlevel studies are required to provide a better understanding of the tribological phenomena occurring in MEMS/NEMS. The emergence of micro/nanotribology and atomic force microscopy-based techniques has provided researchers with a viable approach to address these problems. This paper presents an overview of micro/nanoscale adhesion, friction, and wear studies of materials and lubrication studies for MEMS/NEMS and BioMEMS/BioNEMS. It also presents a review of scale-dependent mechanical properties, and stress and deformation analysis of nanostructures.

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Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

Cited by 366 publications

References 18 publications

Elastic modulus of amorphous SiO2 nanowires

Elastic modulus of amorphous SiO2 nanowires

Measurement of the Bending Strength of Vapor−Liquid−Solid Grown Silicon Nanowires

Nanotribology and nanomechanics in nano/biotechnology

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