2009
DOI: 10.1016/j.optlaseng.2009.06.014
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Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

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Cited by 55 publications
(28 citation statements)
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“…17,[19][20][21] The intensity of the interference pattern on the spectrometer can be expressed as follows:…”
Section: Sdpm Principlesmentioning
confidence: 99%
“…17,[19][20][21] The intensity of the interference pattern on the spectrometer can be expressed as follows:…”
Section: Sdpm Principlesmentioning
confidence: 99%
“…Typically, white light interference fringes are modulated and associated with non-uniform illumination so we use a normalization technique to avoid phase error [40].…”
Section: Working Principlementioning
confidence: 99%
“…By fitting the extracted phase to a theoretical model, the thickness of SiO 2 thin film on a silicon wafer working as a reflecting mirror [34] and the effective thickness of a cube beamsplitter in the interferometer [35] were measured. A comparison of various techniques for phase extraction from spectrally resolved white-light interferometry, the FT, Hilbert transform, spatial phase-shifting, the WFF, and wavelet transform, were presented in [36].…”
Section: Wff2 For White-light Spectral Interferometrymentioning
confidence: 99%