2021
DOI: 10.1016/j.icte.2021.04.007
|View full text |Cite
|
Sign up to set email alerts
|

Evaluation of the machine learning classifier in wafer defects classification

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
11
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
6
4

Relationship

2
8

Authors

Journals

citations
Cited by 35 publications
(15 citation statements)
references
References 11 publications
0
11
0
Order By: Relevance
“…In addition, the objective of authors [20] is to establish the best Machine Learning classifier for the application of wafer defect detection. The experiments proved that the logistic regression classifier is the best classifier for detection with an accuracy of 86.9%.…”
Section: Machine Learning Based Approachesmentioning
confidence: 99%
“…In addition, the objective of authors [20] is to establish the best Machine Learning classifier for the application of wafer defect detection. The experiments proved that the logistic regression classifier is the best classifier for detection with an accuracy of 86.9%.…”
Section: Machine Learning Based Approachesmentioning
confidence: 99%
“…An RF algorithm was used to build prediction models exploiting wafer map features as input variables in order to better predict the die-level failures in the final test [28]. Several ML-based detection approaches, such as Gaussian density estimation, Gaussian mixture model, k-means Clustering, LR, stochastic gradient descent, etc., have been used to detect faulty wafers in semiconductor manufacturing [29,30]. Moreover, ensemble learning-based ML approaches have also shown great performance in the recognition of wafer map failure pattern types.…”
Section: Literature Reviewmentioning
confidence: 99%
“…Generally, TL is used in huge processing tasks to reduce the amount of computational power. TL can be more accurate, faster with lesser data training and successfully implemented in several studies for instance in [12][13][14].…”
Section: Related Workmentioning
confidence: 99%