2003
DOI: 10.3938/jkps.43.747
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Evaluation of the Phonon Mean Free Path in Thin Films by Using Classical Molecular Dynamics

Abstract: A non-equilibrium molecular dynamic (NEMD) study has been performed to evaluate the phonon mean free path (MFP) of a solid material. Solid argon with a Lennard-Jones (L-J) potential is selected as a simulation material. The thermal conductivity of a thin film plays an important role in the design of nano-electro-mechanical systems (NEMS) or micro-electro-mechanical systems (MEMS) since heat removal from these devices is a crucial factor for their intended proper operations. The values calculated by using molec… Show more

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Cited by 32 publications
(24 citation statements)
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“…Time interval for an iteration was selected as Δt=1.0x10 -15 s (=1 fs) and, for the cut-off length of an intermolecular interaction, 3.5 σ AR was used. We confirmed from our previous studies that those parameters produced the calculation data with small fluctuations [16,25,30]. The properties of argon used in a simulation are σ AR =3.4 Å, m AR =6.634x10 -26 kg, and ε AR =1.67x10 -21 J [28,29].…”
Section: Simulation Methodssupporting
confidence: 69%
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“…Time interval for an iteration was selected as Δt=1.0x10 -15 s (=1 fs) and, for the cut-off length of an intermolecular interaction, 3.5 σ AR was used. We confirmed from our previous studies that those parameters produced the calculation data with small fluctuations [16,25,30]. The properties of argon used in a simulation are σ AR =3.4 Å, m AR =6.634x10 -26 kg, and ε AR =1.67x10 -21 J [28,29].…”
Section: Simulation Methodssupporting
confidence: 69%
“…An intermolecular distance was determined to maintain a system to be under a freestanding state, which means a system to be in the zero stress state during a simulation. When the average temperature of a system is 40 K, the intermolecular length of 1.1115 σ AR provides a freestanding state [3,15,16,24,25].…”
Section: Simulation Methodsmentioning
confidence: 99%
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