Evaluation of the wear resistance of ZrN coatings using thin layer activation

Reciprocating wear behaviour of (Zr, Hf)N coatings

“…Since the wear of TiN coatings change dramatically with adjustment of parameters such as contact load, sliding speed, contact geometry and humidity, alternative coatings such as CrN, ZrN and HfN have been developed for certain specific applications [7][8][9][10][11][12][13][14][15].…”

Dureza e resistência ao desgaste da camada de ZrN formada por nitretação a plasma sobre zircônia parcialmente estabilizada com ítria

“…Filmes finos de nitreto de zircônio (ZrN) tem atraído o interesse industrial em aplicações como revestimentos protetores e decorativos [10][11][12][13][14][15][16][17][18][19][20][21][22]. O nitreto de zircônio é um material refratário, com estrutura cristalina cúbica a temperatura ambiente, com estabilidade térmica muito maior do que a do TiN e com dureza Vickers típica de 15 GPa [23,24], embora durezas bem superiores, de até 27 GPa, já tenham sido reportadas [25].…”

Interface Analysis of MIM Capacitor Using ZrN Electrodes and ALD-ZrO2 Dielectrics

“…1,2 Zirconium nitride (ZrN) thin films are widely used as diffusion barriers in microelectronics, hard coatings on cutting tools or abrasion-resistant layer because of its excellent properties such as high hardness, high melting point, chemical inertness, excellent wear resistance, and good electrical properties. [3][4][5][6] Even though ZrN exhibits about 0.5eV-higher work function than TiN, very little is known about its qualities as capacitor electrode. 7 In the view of high k materials, on the other hand, ZrO 2 film has been spotlighted as new dielectric material in TiN/Insulator/TiN (TIT) capacitor replacing HfO 2 film, due to its high dielectric constant, wide band gap, and thermal stability.…”