2008
DOI: 10.1016/j.mee.2007.12.047
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Evaporation based micro pump integrated into a scanning force microscope probe

Abstract: A micro pump was integrated into a scanning force microscope probe for circulating liquid through its hollow cantilever and tip. The interior cross section of the cantilever was 2.25 lm  3.75 lm. All fluidic parts were made of SiO 2 , while the tip apex was made of Si 3 N 4 . The key fabrication techniques were silicon wafer bonding and wet-oxidation. The pumping mechanism was relying on the enhanced evaporation at an enlarged water/air interface at the exit of the microchannel. Capillary forces continuously … Show more

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Cited by 15 publications
(11 citation statements)
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“…Thus, they are required to be miniaturized and integrated with several fluidic components without using an external macro-scale power source or controller. To meet these demands, various types of non-mechanical micropumps utilizing capillary force, surface tension, evaporation, vacuum-driven, and paper-based devices, have been developed410111213. However, most of them still have technological limitations of single-use, short-term operation, or needs of additional integration with a dedicated flow controller.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…Thus, they are required to be miniaturized and integrated with several fluidic components without using an external macro-scale power source or controller. To meet these demands, various types of non-mechanical micropumps utilizing capillary force, surface tension, evaporation, vacuum-driven, and paper-based devices, have been developed410111213. However, most of them still have technological limitations of single-use, short-term operation, or needs of additional integration with a dedicated flow controller.…”
mentioning
confidence: 99%
“…This is a multiple-use pumping system applicable to any hydrophilic liquid including therapeutic agents. Using this system, we can resolve the technical limitations of single-use or short-term use encountered in capillary-based or paper-based micropumps410111213. The LIM can also cope with the thermally sensitive flow rate of conventional evaporative micropumps, whose flow rate is passively determined on the basis of temperature, by using thermo-sensitive hydrogels, poly( N -isopropylacrylamide) (PNIPAAm) (Table 1)1415161718192021222324.…”
mentioning
confidence: 99%
“…For a controlled flow of liquid from the reservoir to the tip, various pumping techniques were developed. In this section, we review the pumping techniques based on liquid evaporation [95], thermal energy [96], electro-osmosis [97], pressure [25] and syringe pump [69]. Pumping becomes even more significant for dispensing in liquid environment due to the absence of capillary forces.…”
Section: Handling Of Fluids Within the Probesmentioning
confidence: 99%
“…Only the geometry of the capillary outlet area needs to be increased to enhance the evaporation thus inducing pumping. The working principle of an evaporation induced pump integrated in a SIP is exemplarily explained in Figure 4a [95]. A water-based solution was filled into the inlet (reservoir).…”
Section: Evaporation Pumpmentioning
confidence: 99%
“…Evaporation can be put to good use by employing it as a microfluidic pumping (Effenhauser et al 2002;Goedecke et al 2002;Heuck et al 2008;Namasivayam et al 2003;Zimmermann et al 2005;Xu et al 2008) or sample concentration (Timmer et al 2003;Walker and Beebe 2002) mechanism. However, evaporation is also seen as a problematic issue for most applications, especially for temperature-controlled small-scale bioreaction systems.…”
Section: Introductionmentioning
confidence: 99%