2002
DOI: 10.1116/1.1481871
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Evidence of storing and erasing of electrons in a nanocrystalline-Si based memory device at 77 K

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Cited by 32 publications
(22 citation statements)
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“…However, both the random distribution of nc-Si dots on a large channel area and the size fluctuations of nc-Si dots may also lead to dispersions in programming/erasing speeds and DV th(FB) . A narrow/ short channel, which is smaller than Debye length of electron in silicon, was developed to compensate for the randomly deposited nc-Si dots by containing several sizeuniformed nc-Si dots only [44].…”
Section: Storing Charges With Multiple Nc-si Dotsmentioning
confidence: 99%
“…However, both the random distribution of nc-Si dots on a large channel area and the size fluctuations of nc-Si dots may also lead to dispersions in programming/erasing speeds and DV th(FB) . A narrow/ short channel, which is smaller than Debye length of electron in silicon, was developed to compensate for the randomly deposited nc-Si dots by containing several sizeuniformed nc-Si dots only [44].…”
Section: Storing Charges With Multiple Nc-si Dotsmentioning
confidence: 99%
“…It has gradually become clear that to have an improved and reliable device performance, it is necessary to have a short and narrow channel with an active area containing a few nc-Si dots with a well-defined size distribution. In a previous paper [7], we briefly reported the operation of an ideal short and narrow channel nc-Si-based memory device at liquid nitrogen temperature, where it was pointed out that current-voltage ( -) measurements could be an effective tool to experimentally observe electron trapping-detrapping events associated with the nc-Si dots. Though participation of a single nc-Si dot among several nc-Si dots in the active area was concluded, effects of the neighboring dots were not apparent.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, single electron tunneling (SET) and Coulomb charging phenomena in metal-oxide-semiconductor (MOS) structure containing nc-Si in silicon dioxide matrix, which is also called nc-Si floating gate doublebarrier structure (metal/SiO 2 /nc-Si/SiO 2 /Si), has attracted great interest due to its potential application in future nano-electronic devices [1][2][3][4][5]. The nc-Si floating gate double-barrier structure with the principle of direct tunneling and charge storage is a basic unit for nanoelectronic devices, such as single electron memory.…”
Section: Introductionmentioning
confidence: 99%