1997
DOI: 10.1063/1.119893
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Evolution of stress relaxation and yellow luminescence in GaN/sapphire by Si incorporation

Abstract: Stress and wafer bending of a -plane GaN layers on r -plane sapphire substrates

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Cited by 115 publications
(61 citation statements)
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“…11,12 The origin of this band gap transition is still the subject of speculation. [13][14][15][16] It is most likely due to defects caused by the Si-dopant 16,17 or unintentional O. 16 In our samples the intensity of this line is strong.…”
mentioning
confidence: 92%
“…11,12 The origin of this band gap transition is still the subject of speculation. [13][14][15][16] It is most likely due to defects caused by the Si-dopant 16,17 or unintentional O. 16 In our samples the intensity of this line is strong.…”
mentioning
confidence: 92%
“…Among others, the stress relaxation in Si-doped GaN and undoped GaN films has been the focus of a number of recent studies. 4,[9][10][11] The effect of silicon doping on the mechanism of stress relaxation and defect formation in GaN is still under discussion. Ruvimov et al 4 suggest that the thermal stress is partly relaxed by migration of threading dislocations, leaving additional misfit dislocations in the basal plane.…”
Section: Introductionmentioning
confidence: 99%
“…An additional complication arises for AlGaN grown on sapphire, the most common substrate of choice, as the sapphire (linear thermal expansion coefficient α ~ 7.6x10 -6 k -1 ) exerts a compressive strain to the AlGaN layers (α ~ 5.6x10 -6 k -1 ) during cool down which tends to mask the grown-in tensile strain due to lattice mismatch. Most of the post-growth ex-situ strain characterizations [8][9][10][11][12][13] would in this case measure a combination of a tensile stress due to lattice mismatch and a compressive component due to thermal expansion mismatch. In an attempt to isolate these two competing factors by directly probing the grown-in strain, we have employed an in-situ stress/strain monitor based on wafer-curvature measurement [14].…”
Section: Introductionmentioning
confidence: 99%