“…[22][23][24] This renders semi-transparent quaternary metal oxynitrides generally as very promising photoanode candidates for PEC tandem cells, which could outperform Ta 3 N 5 -based devices. So far, semi-transparent quaternary metal oxynitride films have been mainly fabricated by means of reactive radiofrequency (RF) magnetron sputtering [25][26][27][28] or pulsed laser deposition (PLD) 29,30 on MgO or Nb:SrTiO 3 substrate. In case of the RF approach, the oxynitride sputtering targets have to be made first with multi-step processes, and harsh conditions (usually up to 1073 K for film deposition) are required, too.…”