Examples for application and diagnostics in plasma–powder interaction

Kersten, Holger; Wiese, Ruben; Thieme, G.; Fröhlich, Maik; Kopitov, A.; Bojic, D.; Scholze, Frank; Neumann, H.; Quaas, M.; Wulff, H.; Hippler, R.

doi:10.1088/1367-2630/5/1/393

Cited by 42 publications

(25 citation statements)

References 21 publications

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“…Powders which are produced or modified by plasma processing have interesting and useful properties, e.g., small sizes (nanometer to micrometer range), uniform size distribution, and chemical activity. Size, structure, and composition can be tailored to the specific requirements, depending on the desired application [11,17,20]. Coating of externally injected particles was demonstrated by Kersten et al [18,20], employing a rf plasma for charging and confinement of particles, while metal coating was achieved by means of a combined dc magnetron sputter source.…”

Section: Introductionmentioning

confidence: 99%

“…Size, structure, and composition can be tailored to the specific requirements, depending on the desired application [11,17,20]. Coating of externally injected particles was demonstrated by Kersten et al [18,20], employing a rf plasma for charging and confinement of particles, while metal coating was achieved by means of a combined dc magnetron sputter source. Although dusty plasmas can be studied in laboratory, researchers up until now have only been able to study two-dimensional effects as gravity outbalances the electrostatic interactions among the particles.…”

Section: Introductionmentioning

confidence: 99%

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Ion Molecule and Dust Particle Formation in Ar/CH₄, Ar/C₂H₂ and Ar/C₃H₆ Radio‐frequency Plasmas

Thieme

Fröhlich

et al. 2005

Contrib. Plasma Phys.

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Molecule and particle formation in a capacitively coupled radio-frequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording the intensity of the transmitted and scattered laser light signal from the particle cloud. An oscillation of the transmitted laser intensity was observed which is caused by periodic formation and expansion of a central void. This behavior can be explained by multigeneration dust cloud formation.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Ion Molecule and Dust Particle Formation in Ar/CH₄, Ar/C₂H₂ and Ar/C₃H₆ Radio‐frequency Plasmas

Thieme

Fröhlich

et al. 2005

Contrib. Plasma Phys.

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“…Moreover, AlO x thin films can be deposited by using ATI-containing plasmas, e.g. working as barrier coatings or for encapsulation of phosphors [16].…”

Section: Introductionmentioning

confidence: 99%

“…Although ATI containing plasmas are used in PECVD processes [16], the chemical reactions are far from being completely understood. The knowledge about the fragmentation and reaction processes in the ATI plasma, which are induced by electron impact processes, is an essential presumption for the optimization of Al x O y deposition.…”

Section: Introductionmentioning

confidence: 99%

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Hübner¹,

Fröhlich²,

Tawidian³

et al. 2014

Contrib. Plasma Phys.

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International audienceIn Ar and Ar/N2 radio frequency (RF) discharges with admixtures of aluminium tri-isopropoxide (ATI) the fragmentation of this metal-organic precursor was studied by means of Fourier Transform Infrared (FTIR) spectroscopy using an optical long path cell providing an optical length of l= 17.2 m. The experiments were performed in an asymmetric capacitively coupled process plasma at a frequency of f= 13.56 MHz and at pressure values in the range of p= 1 - 10.5 Pa. The discharge power was chosen between P= 10 - 100 W. Using FTIR spectroscopy the evolution of the concentrations of ATI and of six stable molecules, CH4, C2H2, C2H4, C2H6, CO and HCN, was monitored under flowing conditions at gas flows of Φtotal= 0.5 - 14.5 sccm in the discharge. The concentrations of the reaction products were measured to be between 2 x 1012 molecules cm−3 as e.g. found for C2H4 and C2H6, and 5 x 1013 molecules cm−3, as e.g. in the case of CO. In the plasma a complete dissociation of the precursor ATI was found at a power value of about P= 80 W independent on the admixture of Ar or N2. The fragmentation efficiency (FE) of the reaction products which originate from the ATI molecules ranges between 0.2 and 4 x 1016 molecules J−1 while the fragmentation rate (FR) reached up to 2.5 x 1018 molecules s−1. The multi component detection ability of the spectrometer served to analyse the carbon balance of the by-product formation. For all experiments, the carbon balance never exceeded 25%. Therefore, in the plasmas the majority of the provided carbon is most likely deposited at the reactor walls or forms dust particles or higher molecular CxHy. The conversion efficiencies (CE) of the produced molecular species ranges between 0.1 x 1015 molecules J−1 for C2H4 and 5 x 1015 molecules J−1 for C2H6 depending on the discharge conditions of the RF plasma

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“…This deposition, not on a planar substrate (two-dimensional, 2D) but on levitated particles (3D), is technologically interesting. Kersten et al reported the aluminum particles growth using the "3D" method [7].…”

Section: Introductionmentioning

confidence: 99%

Environment with reduced ion bombardment energy for levitated particles in an rf plasma

Shimizu

Annaratone

Shimizu

et al. 2008

Plasma Sources Sci. Technol.

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We describe levitation of diamond fine particles in the H 2 rf plasma chamber equipped with an adaptive rf electrode. Since suppression of ion bombardment is essential for crystalline diamond growth, we use an adaptive rf electrode system in a parallel-plate capacitively coupled rf plasma in order to levitate particles in a quasineutral "spot plasma" region. Here the ions energy corresponds only to the floating potential of the particles without the additional energy of the streaming ions as in the sheath. One can expect ion bombardment with greatly reduced ion energy when this technique is applied to diamond deposition on levitated particles.

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Examples for application and diagnostics in plasma–powder interaction

Cited by 42 publications

References 21 publications

Ion Molecule and Dust Particle Formation in Ar/CH₄, Ar/C₂H₂ and Ar/C₃H₆ Radio‐frequency Plasmas

Ion Molecule and Dust Particle Formation in Ar/CH₄, Ar/C₂H₂ and Ar/C₃H₆ Radio‐frequency Plasmas

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Environment with reduced ion bombardment energy for levitated particles in an rf plasma

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Examples for application and diagnostics in plasma–powder interaction

Cited by 42 publications

References 21 publications

Ion Molecule and Dust Particle Formation in Ar/CH4, Ar/C2H2 and Ar/C3H6 Radio‐frequency Plasmas

Ion Molecule and Dust Particle Formation in Ar/CH4, Ar/C2H2 and Ar/C3H6 Radio‐frequency Plasmas

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Environment with reduced ion bombardment energy for levitated particles in an rf plasma

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Ion Molecule and Dust Particle Formation in Ar/CH₄, Ar/C₂H₂ and Ar/C₃H₆ Radio‐frequency Plasmas

Ion Molecule and Dust Particle Formation in Ar/CH₄, Ar/C₂H₂ and Ar/C₃H₆ Radio‐frequency Plasmas