Excimer laser machining of microvias in glass substrates for the manufacture of high density interconnects

Bhatt, Deepa; Hutt, David A.; Conway, Paul

doi:10.1007/s00340-012-5106-6

Cited by 5 publications

(1 citation statement)

References 14 publications

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“…Excimer lasers are widely used in many applications, such as chemical analysis of solid samples by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) [1][2][3], high-resolution photolithography, which is a critical technology used in the manufacturing of microelectronic devices [4,5], micromachining and processing of a wide range of materials [5][6][7][8][9][10], and many other applications [11][12][13][14]. The fast growth in excimer laser applications over the last two decades is largely related to the availability of relatively low cost, reliable, and powerful commercial laser systems, together with the need for better understanding of laser-matter interaction [15,16].…”

Section: Introductionmentioning

confidence: 99%

Excimer laser ablation of aluminum: influence of spot size on ablation rate

2016

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The dependence of ablation rate of an Al alloy on laser beam spot size (10-150 µm) was investigated using an ArF excimer laser operating at a wavelength of 193 nm and pulse width less than 4 ns. Ablation was conducted in air at a fluence of 11 J cm −2 and at a repetition rate of 20 Hz. Surface morphology and depth of craters produced by a variable number of laser pulses were characterized using optical and scanning electron microscopy. Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was used as an additional diagnostic technique to estimate the amount of material ablated from craters produced by a laser beam of different diameters. Laser beam spot size and number of laser pulses applied to the same spot were found to influence crater morphology, ablation rate, shape and amount of particles deposited at or around the crater rim. Ablation rate was found to be less dependent on spot size for craters greater than 85 µm. A four-fold increase in ablation rate was observed with decreasing crater size from 150 µm to 10 µm.

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