2010 11th International Thermal, Mechanical &Amp; Multi-Physics Simulation, and Experiments in Microelectronics and Microsystem 2010
DOI: 10.1109/esime.2010.5464542
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Exemplified calculation of stress migration in a 90nm node via structure

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Cited by 18 publications
(2 citation statements)
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“…The program allows the simulation of current density, temperature gradients and mechanical stress distributions in the metallization structures. For the calculations of mass fluxes and mass flux divergences, a user routine described in [2] was used.…”
Section: Simulation Procedures and Model Descriptionmentioning
confidence: 99%
“…The program allows the simulation of current density, temperature gradients and mechanical stress distributions in the metallization structures. For the calculations of mass fluxes and mass flux divergences, a user routine described in [2] was used.…”
Section: Simulation Procedures and Model Descriptionmentioning
confidence: 99%
“…The mechanical and electrical material properties used in the simulations are given in Table 1. The material data were taken from literature or measurements of earlier investigations [2,3]. The geometrical data were taken partly from [4,5].…”
Section: Introductionmentioning
confidence: 99%