Experience with the use of a turbomolecular pump combined with a NEG pump in UHV conditions

Pozzo, A.; Boffito, C.; Mazza, F.

doi:10.1016/0042-207x(96)00066-8

Cited by 17 publications

(5 citation statements)

References 5 publications

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“…The effective pumping speed for H 2 O and other active gases has been proven in UHV systems with TMPs and NEGPs. 18,19) Figures 1(a) and 1(b) show the change in the amount of residual gas in the chamber during the deposition of organic layers in the systems evacuated using TMPs and both TMPs and NEGPs. The outgassing from heated evaporation sources during the deposition of the layer made the chamber more contaminated compared with the initial condition, probably because of the out-gassing from the heated carbon crucibles.…”

mentioning

confidence: 99%

Fivefold enhancement in stability of organic light-emitting diodes with addition of non-evaporable getter pumps

Oyama

Sakai

et al. 2017

Appl. Phys. Express

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We demonstrate a significant enhancement of the operational stability of organic light-emitting diodes (OLEDs) by fabricating the devices under ultrahigh-vacuum (UHV) conditions in the region of 10−10–10−11 Torr. The UHV condition is achieved by utilizing non-evaporable getter pumps together with regular turbo molecular pumps in an OLED deposition chamber. The short-term stability of the OLEDs is prolonged fivefold because of the removal of detrimental gases, especially water. We suggest that ultra-clean fabrication conditions are indispensable for revealing the true intrinsic degradation mode of OLEDs. Additionally, we analyze the effect of operating residual gas analyzers during the device fabrication.

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confidence: 99%

Fivefold enhancement in stability of organic light-emitting diodes with addition of non-evaporable getter pumps

Oyama

Sakai

et al. 2017

Appl. Phys. Express

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“…NEG pumps have been developed in the 70's and since then they have been widely used by the industry, R&D labs, research centers and large physics projects like accelerators, synchrotrons or fusion reactors. They are used in combination with other pumps, like SIP or TMP [2,3], to improve the final vacuum or reduce the pump down time in a system or to remove contaminants which cannot be pumped by other pumps. They generally operate in the 10 -7 -10 -13 mbar range and present several very unique features:…”

Section: Neg Pumps Featuresmentioning

confidence: 99%

Non evaporable getter (NEG) technology: A powerful tool for UHV-XHV systems

Maccallini¹,

Siviero²,

Bonucci³

et al. 2012

AIP Conference Proceedings

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Articles you may be interested inCharacterization of alkali metal dispensers and non-evaporable getter pumps in ultrahigh vacuum systems for cold atomic sensors Abstract. Ultra and Extreme High Vacuum (UHV and XHV respectively) levels are needed in several vacuum-related applications for wide pressure and time range. The Non Evaporable Getter (NEG) technology is one of the most important examples to get XHV/UHV condition in the vacuum systems. In fact the high reactivity of the getter materials towards active gases in a wide temperature range (from room temperature to several hundreds of °C) allows removing very efficiently active gases such as H 2 , H 2 O, CO 2 , CO, N 2 , and so on. When declining, the pumping speed of NEG can be easily restored, by reactivating the getter material with a thermal process ("reactivation"). In this framework, SAES Getters S.p.A. has a long expertise in producing NEG pumps (and more in general NEG technology) which can provide vacuum conditions from the low to the ultra high level. An overall overview of NEG pump technology will be given in this paper considering 1) the involved mechanisms for gas adsorption into the NEG material, 2) operational conditions of NEG pumps and 3) example of applications which demonstrate the benefits of NEG pumps use in XHV/UHV systems. Future perspectives for NEG pumps in UHV/XHV applications will be also given.

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“…Furthermore, there are several papers in literature discussing the characterization and performance of the St707 getter strip to be used as a guideline. [6][7][8] The most interesting feature of this getter material is its moderately low activation tempertaure, that allows pump activation during the bakeout of the vacuum system. The penning gauge ensures the necessary pumping speed for noble gases and provides, at the same time, a measurement of the container pressure.…”

Section: Introductionmentioning

confidence: 99%

New getter pump for ultrahigh vacuum systems and transportable enclosure

Firpo

Pozzo

2004

Review of Scientific Instruments

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We have developed a new type of nonevaporable getter (NEG) pump. It is based on the getter strip St707, produced by SAES getters S.p.A, fitted into a CF-flanged container. The pump is activated at 400°C for 1 h and its pumping behavior is studied for H2, CO, and N2. The pumping speed is about 500 liters/s for H2, 230 liters/ for CO, and 130 liters/s for N2, which is in good agreement with our theoretical pumping model. While its performance is similar to those of commercial NEG pumps, it is definitely more compact, inexpensive, and easy to use. When coupled with single-penning cell, our NEG pump can replace conventional ion pumps in the design of compact ultrahigh vacuum (UHV) systems. Its first application will be as an efficient and compact pumping device for portable UHV enclosure.

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Experience with the use of a turbomolecular pump combined with a NEG pump in UHV conditions

Cited by 17 publications

References 5 publications

Fivefold enhancement in stability of organic light-emitting diodes with addition of non-evaporable getter pumps

Fivefold enhancement in stability of organic light-emitting diodes with addition of non-evaporable getter pumps

Non evaporable getter (NEG) technology: A powerful tool for UHV-XHV systems

New getter pump for ultrahigh vacuum systems and transportable enclosure

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