Keywords: ball lens, quadrant photodiode detector, rotational accuracy, axial error, radial error This paper presents a 3D optical sensor system for measuring errors in the motion of a rotating stage or spindle based on optical axis deviation using a precision ball lens. The radial and axial errors can be simultaneously measured during rotation. The 3D sensor consists of two quadrant photodiode detectors (QDs), two laser diodes, and a ball lens mounted on the rotating stage or spindle. Rotational errors cause changes in the optical axis of the ball lens. The resulting deflections of the laser beams are detected by the QDs and their output signals are used to determine errors. The radial and axial rotational errors can be calculated as described by the mathematical model. Experimental results showed that the measuring accuracy was within ±1 µm at a resolution of about 20 nm.